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Zinc nickel oxide target as well as preparation method and application thereof
The invention belongs to the technical field of semiconductor materials, and provides a nickel-zinc oxide target material and a preparation method and application thereof. Main raw materials of the nickel-zinc oxide target material comprise nickel oxide and a certain proportion of dopant, the dopant is zinc oxide, the conductivity of the material can be improved after the nickel oxide is doped with the zinc oxide, the nickel-zinc oxide target material can be further prepared into a film subsequently, and the film transmittance is high; zinc oxide also has a sintering assisting effect, so that the density of the target material can be improved; and compared with other metal oxides, zinc oxide has the characteristics of low price, stability, high purity, environmental protection and the like. The relative density of the nickel-zinc oxide target material provided by the invention is 87.4-98.2%, the resistivity is as low as 2.7 * 10 < 4 >-3.5 * 10 < 6 > omega.cm, and after the target material is prepared into a thin film, the transmittance of the thin film can reach 78-84%, so that the nickel-zinc oxide target material is suitable for a hole transport layer of a perovskite solar cell.
本发明属于半导体材料技术领域，提供了一种氧化镍锌靶材及其制备方法和应用。本发明提供的氧化镍锌靶材的主要原料包括氧化镍和一定比例的掺杂剂，其中掺杂剂为氧化锌，氧化镍掺杂氧化锌后可提高材料的电导率，后续可进一步将氧化镍锌靶材制成薄膜，薄膜透过率高；氧化锌还具有助烧作用，可提高靶材的密度；而且氧化锌相比于其他金属氧化物，具有价格低廉、稳定、纯度高、环保等特点。本发明提供的氧化镍锌靶材的相对密度87.4‑98.2％，电阻率低至2.7×104‑3.5×106Ω·cm，将这些靶材制得薄膜后，薄膜透过率可达到78‑84％，适用于钙钛矿太阳能电池的空穴传输层。
Zinc nickel oxide target as well as preparation method and application thereof
The invention belongs to the technical field of semiconductor materials, and provides a nickel-zinc oxide target material and a preparation method and application thereof. Main raw materials of the nickel-zinc oxide target material comprise nickel oxide and a certain proportion of dopant, the dopant is zinc oxide, the conductivity of the material can be improved after the nickel oxide is doped with the zinc oxide, the nickel-zinc oxide target material can be further prepared into a film subsequently, and the film transmittance is high; zinc oxide also has a sintering assisting effect, so that the density of the target material can be improved; and compared with other metal oxides, zinc oxide has the characteristics of low price, stability, high purity, environmental protection and the like. The relative density of the nickel-zinc oxide target material provided by the invention is 87.4-98.2%, the resistivity is as low as 2.7 * 10 < 4 >-3.5 * 10 < 6 > omega.cm, and after the target material is prepared into a thin film, the transmittance of the thin film can reach 78-84%, so that the nickel-zinc oxide target material is suitable for a hole transport layer of a perovskite solar cell.
本发明属于半导体材料技术领域，提供了一种氧化镍锌靶材及其制备方法和应用。本发明提供的氧化镍锌靶材的主要原料包括氧化镍和一定比例的掺杂剂，其中掺杂剂为氧化锌，氧化镍掺杂氧化锌后可提高材料的电导率，后续可进一步将氧化镍锌靶材制成薄膜，薄膜透过率高；氧化锌还具有助烧作用，可提高靶材的密度；而且氧化锌相比于其他金属氧化物，具有价格低廉、稳定、纯度高、环保等特点。本发明提供的氧化镍锌靶材的相对密度87.4‑98.2％，电阻率低至2.7×104‑3.5×106Ω·cm，将这些靶材制得薄膜后，薄膜透过率可达到78‑84％，适用于钙钛矿太阳能电池的空穴传输层。
Zinc nickel oxide target as well as preparation method and application thereof
一种氧化镍锌靶材及其制备方法和应用
LUO ZEYU (author) / CHEN LU (author) / GE CHUNQIAO (author)
2024-08-13
Patent
Electronic Resource
Chinese
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