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A platform for research: civil engineering, architecture and urbanism
Tape casting preparation method of aluminum oxide ceramic chip for electrostatic chuck
The invention provides a tape casting preparation method of an aluminum oxide ceramic chip for an electrostatic chuck, which comprises the following steps: mixing all raw materials to obtain aluminum oxide slurry, and sequentially carrying out tape casting, screen printing, hot pressing, cold isostatic pressing and sintering to obtain the aluminum oxide ceramic chip for the electrostatic chuck. The aluminum oxide ceramic chip for the electrostatic chuck, which is uniform in size, good in processability, high in compactness, smooth in internal dielectric layer and heating layer, stable in adsorption performance, uniform in heating and excellent in bending resistance, can be prepared.
本发明提供了一种静电吸盘用氧化铝陶瓷片流延成型制备方法，所述流延成型制备方法将所有原料混合得到的氧化铝浆料，依次进行流延成型、丝网印刷、热压、冷等静压、烧结，可以制备得到尺寸均匀、加工性能好、高致密、内部电介质层及加热层平整、吸附性能稳定、加热均匀和抗弯性能优异的静电吸盘用氧化铝陶瓷片。
Tape casting preparation method of aluminum oxide ceramic chip for electrostatic chuck
The invention provides a tape casting preparation method of an aluminum oxide ceramic chip for an electrostatic chuck, which comprises the following steps: mixing all raw materials to obtain aluminum oxide slurry, and sequentially carrying out tape casting, screen printing, hot pressing, cold isostatic pressing and sintering to obtain the aluminum oxide ceramic chip for the electrostatic chuck. The aluminum oxide ceramic chip for the electrostatic chuck, which is uniform in size, good in processability, high in compactness, smooth in internal dielectric layer and heating layer, stable in adsorption performance, uniform in heating and excellent in bending resistance, can be prepared.
本发明提供了一种静电吸盘用氧化铝陶瓷片流延成型制备方法，所述流延成型制备方法将所有原料混合得到的氧化铝浆料，依次进行流延成型、丝网印刷、热压、冷等静压、烧结，可以制备得到尺寸均匀、加工性能好、高致密、内部电介质层及加热层平整、吸附性能稳定、加热均匀和抗弯性能优异的静电吸盘用氧化铝陶瓷片。
Tape casting preparation method of aluminum oxide ceramic chip for electrostatic chuck
一种静电吸盘用氧化铝陶瓷片流延成型制备方法
YAO LIJUN (author) / PAN JIE (author) / HUANG WENJIE (author) / WU DONGQING (author) / ZHOU YOUPING (author) / HUANG YINCHI (author)
2024-08-16
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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