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Preparation method of high-thermal-conductivity aluminum nitride ceramic electrostatic chuck
The invention discloses a preparation method of a high-thermal-conductivity aluminum nitride ceramic electrostatic chuck, and belongs to the technical field of electrostatic chucks. The preparation method comprises the following steps: forming a green body: preparing an aluminum nitride ceramic green body; a first cutter PCD milling cutter is assembled, a first punching parameter is set, a first hole is drilled, then the first hole is filled with a cylinder, and the first punching parameter is that the rotating speed ranges from 4000 rpm to 8000 rpm, and the feeding speed ranges from 300 mm/min to 900 mm/min; high-temperature sintering: punching a first hole after the aluminum nitride ceramic green body is manufactured, and sintering after punching; a second cutter diamond grinding head is assembled, a second punching parameter is set, a second hole is drilled, and the second punching parameter is that the rotating speed ranges from 15,000 rpm to 24,000 rpm, and the feeding speed ranges from 100 mm/min to 500 mm/min.
本发明公开了一种高热导率氮化铝陶瓷静电卡盘的制备方法，属于静电卡盘技术领域，所述制备方法包括：生坯成型：制备氮化铝陶瓷生坯；生坯打孔：装配第一刀具PCD铣刀，设定第一打孔参数，钻打第一孔，然后在第一孔中填入圆柱，所述第一打孔参数为转速为4000～8000rpm、给进速度为300～900mm/min；高温烧结：氮化铝陶瓷生坯制造后打第一孔，打孔后进行烧结；熟瓷打孔：装配第二刀具金刚石磨头，设定第二打孔参数，钻打第二孔，所述第二打孔参数为转速为15000～24000rpm、给进速度为100～500mm/min。
Preparation method of high-thermal-conductivity aluminum nitride ceramic electrostatic chuck
The invention discloses a preparation method of a high-thermal-conductivity aluminum nitride ceramic electrostatic chuck, and belongs to the technical field of electrostatic chucks. The preparation method comprises the following steps: forming a green body: preparing an aluminum nitride ceramic green body; a first cutter PCD milling cutter is assembled, a first punching parameter is set, a first hole is drilled, then the first hole is filled with a cylinder, and the first punching parameter is that the rotating speed ranges from 4000 rpm to 8000 rpm, and the feeding speed ranges from 300 mm/min to 900 mm/min; high-temperature sintering: punching a first hole after the aluminum nitride ceramic green body is manufactured, and sintering after punching; a second cutter diamond grinding head is assembled, a second punching parameter is set, a second hole is drilled, and the second punching parameter is that the rotating speed ranges from 15,000 rpm to 24,000 rpm, and the feeding speed ranges from 100 mm/min to 500 mm/min.
本发明公开了一种高热导率氮化铝陶瓷静电卡盘的制备方法，属于静电卡盘技术领域，所述制备方法包括：生坯成型：制备氮化铝陶瓷生坯；生坯打孔：装配第一刀具PCD铣刀，设定第一打孔参数，钻打第一孔，然后在第一孔中填入圆柱，所述第一打孔参数为转速为4000～8000rpm、给进速度为300～900mm/min；高温烧结：氮化铝陶瓷生坯制造后打第一孔，打孔后进行烧结；熟瓷打孔：装配第二刀具金刚石磨头，设定第二打孔参数，钻打第二孔，所述第二打孔参数为转速为15000～24000rpm、给进速度为100～500mm/min。
Preparation method of high-thermal-conductivity aluminum nitride ceramic electrostatic chuck
一种高热导率氮化铝陶瓷静电卡盘的制备方法
DAI YI (author) / LI JUN (author) / SHI ZHEYUAN (author) / XIAO WEI (author)
2024-06-14
Patent
Electronic Resource
Chinese
IPC:
B28B
Formgeben von Ton oder anderen keramischen Stoffzusammensetzungen, Schlacke oder von Mischungen, die zementartiges Material enthalten, z.B. Putzmörtel
,
SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG OR MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
/
B24B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
,
Maschinen, Einrichtungen oder Verfahren zum Schleifen oder Polieren
/
C04B
Kalk
,
LIME
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