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Ceramic slurry, aluminum nitride ceramic material, preparation method of aluminum nitride ceramic material and electrostatic chuck
The invention provides ceramic slurry, an aluminum nitride ceramic material, a preparation method of the aluminum nitride ceramic material and an electrostatic chuck, and relates to the field of ceramic materials. The ceramic slurry comprises the following components: aluminum nitride powder, a matrix resistance adjusting agent and an organic solvent, wherein the particle size distribution range of the aluminum nitride powder is 100-1000nm; the matrix resistance adjusting agent is a transition metal nitride, and the mass ratio of the matrix resistance adjusting agent to the aluminum nitride powder is less than 0.03%. The aluminum nitride ceramic material prepared by using the ceramic slurry disclosed by the invention not only can maintain good thermal conductivity, but also can keep the volume resistivity in a proper range at a high temperature, so that the requirements of an electrostatic chuck are met. The electrostatic chuck containing the aluminum nitride ceramic material disclosed by the invention not only can ensure the processing precision of wafers, but also has a wide-range use temperature range, stable adsorption force and efficient and controllable desorption.
本申请提供一种陶瓷浆料、氮化铝陶瓷材料及其制备方法、静电卡盘，涉及陶瓷材料领域。本申请中的陶瓷浆料的组分包括：氮化铝粉体、基体调阻剂、有机溶剂，其中氮化铝粉体的粒径分布范围为100～1000nm；基体调阻剂为过渡金属氮化物，且基体调阻剂与氮化铝粉体的质量比小于0.03％。使用本申请的陶瓷浆料制备的氮化铝陶瓷材料不仅能维持良好的热导率，而且其高温下的体积电阻率也能保持在合适的范围，从而满足静电卡盘的需求。含有本申请氮化铝陶瓷材料的静电卡盘不仅能够保证晶圆的加工精度，还具有大范围的使用温度域、稳定的吸附力与高效可控的脱附性。
Ceramic slurry, aluminum nitride ceramic material, preparation method of aluminum nitride ceramic material and electrostatic chuck
The invention provides ceramic slurry, an aluminum nitride ceramic material, a preparation method of the aluminum nitride ceramic material and an electrostatic chuck, and relates to the field of ceramic materials. The ceramic slurry comprises the following components: aluminum nitride powder, a matrix resistance adjusting agent and an organic solvent, wherein the particle size distribution range of the aluminum nitride powder is 100-1000nm; the matrix resistance adjusting agent is a transition metal nitride, and the mass ratio of the matrix resistance adjusting agent to the aluminum nitride powder is less than 0.03%. The aluminum nitride ceramic material prepared by using the ceramic slurry disclosed by the invention not only can maintain good thermal conductivity, but also can keep the volume resistivity in a proper range at a high temperature, so that the requirements of an electrostatic chuck are met. The electrostatic chuck containing the aluminum nitride ceramic material disclosed by the invention not only can ensure the processing precision of wafers, but also has a wide-range use temperature range, stable adsorption force and efficient and controllable desorption.
本申请提供一种陶瓷浆料、氮化铝陶瓷材料及其制备方法、静电卡盘，涉及陶瓷材料领域。本申请中的陶瓷浆料的组分包括：氮化铝粉体、基体调阻剂、有机溶剂，其中氮化铝粉体的粒径分布范围为100～1000nm；基体调阻剂为过渡金属氮化物，且基体调阻剂与氮化铝粉体的质量比小于0.03％。使用本申请的陶瓷浆料制备的氮化铝陶瓷材料不仅能维持良好的热导率，而且其高温下的体积电阻率也能保持在合适的范围，从而满足静电卡盘的需求。含有本申请氮化铝陶瓷材料的静电卡盘不仅能够保证晶圆的加工精度，还具有大范围的使用温度域、稳定的吸附力与高效可控的脱附性。
Ceramic slurry, aluminum nitride ceramic material, preparation method of aluminum nitride ceramic material and electrostatic chuck
一种陶瓷浆料、氮化铝陶瓷材料及其制备方法、静电卡盘
QIU DONGXING (author) / ZHANG LUO (author) / AI JUNDI (author) / LI YIFAN (author) / LI BO (author)
2024-10-11
Patent
Electronic Resource
Chinese
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