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Aluminum nitride ceramic electrostatic chuck and preparation method thereof
The invention discloses an aluminum nitride ceramic electrostatic chuck and a preparation method thereof, and belongs to the technical field of electrostatic chucks, the electrostatic chuck comprises a circular aluminum nitride ceramic matrix and a metal net, the metal net is arranged in the aluminum nitride ceramic matrix, the aluminum nitride ceramic matrix is a cylinder with the diameter of 200-300 mm and the thickness of 1-50 mm, and the aluminum nitride ceramic matrix is a cylindrical body with the diameter of 200-300 mm and the thickness of 1-50 mm. The edge of the aluminum nitride ceramic substrate is provided with an identification point and two or more than two bayonet points. The preparation method comprises the following steps: preparing an upper green block and a lower green block; an upper green body block and a lower green body block are processed into a green body with two bayonets located on the same diameter and identification points. And putting the lower green block into a dry pressing mold. And placing the green block, and pressurizing on a static press. And the pressed material sheets are transferred into a hot-pressing sintering furnace mold to be sintered after being subjected to glue discharging. And the ceramic is transferred to the hot isostatic pressing mold according to the corresponding bayonet and identification point positions and then is sintered.
本发明公开了一种氮化铝陶瓷静电卡盘及其制备方法，属于静电卡盘技术领域，静电卡盘包括圆形的氮化铝陶瓷基体和金属网，金属网设置在所述氮化铝陶瓷基体的内部，氮化铝陶瓷基体为直径200～300mm、厚度1～50mm的圆柱体，氮化铝陶瓷基体的边缘设有识别点以及两个或者两个以上的卡口点。其制备方法包括以下步骤：制备上生坯块和下生坯块。将上生坯块和下生坯块加工成带有两个位于同一直径上的卡口、带有识别点的生坯。将下生坯块放入干压模具中。放上生坯块，静压机上加压处理。将压完的料片进行排胶后转移到热压烧结炉模具中烧结。在上步陶瓷转移至热等静压模具按照对应卡口、识别点位置放置后进行烧结。
Aluminum nitride ceramic electrostatic chuck and preparation method thereof
The invention discloses an aluminum nitride ceramic electrostatic chuck and a preparation method thereof, and belongs to the technical field of electrostatic chucks, the electrostatic chuck comprises a circular aluminum nitride ceramic matrix and a metal net, the metal net is arranged in the aluminum nitride ceramic matrix, the aluminum nitride ceramic matrix is a cylinder with the diameter of 200-300 mm and the thickness of 1-50 mm, and the aluminum nitride ceramic matrix is a cylindrical body with the diameter of 200-300 mm and the thickness of 1-50 mm. The edge of the aluminum nitride ceramic substrate is provided with an identification point and two or more than two bayonet points. The preparation method comprises the following steps: preparing an upper green block and a lower green block; an upper green body block and a lower green body block are processed into a green body with two bayonets located on the same diameter and identification points. And putting the lower green block into a dry pressing mold. And placing the green block, and pressurizing on a static press. And the pressed material sheets are transferred into a hot-pressing sintering furnace mold to be sintered after being subjected to glue discharging. And the ceramic is transferred to the hot isostatic pressing mold according to the corresponding bayonet and identification point positions and then is sintered.
本发明公开了一种氮化铝陶瓷静电卡盘及其制备方法，属于静电卡盘技术领域，静电卡盘包括圆形的氮化铝陶瓷基体和金属网，金属网设置在所述氮化铝陶瓷基体的内部，氮化铝陶瓷基体为直径200～300mm、厚度1～50mm的圆柱体，氮化铝陶瓷基体的边缘设有识别点以及两个或者两个以上的卡口点。其制备方法包括以下步骤：制备上生坯块和下生坯块。将上生坯块和下生坯块加工成带有两个位于同一直径上的卡口、带有识别点的生坯。将下生坯块放入干压模具中。放上生坯块，静压机上加压处理。将压完的料片进行排胶后转移到热压烧结炉模具中烧结。在上步陶瓷转移至热等静压模具按照对应卡口、识别点位置放置后进行烧结。
Aluminum nitride ceramic electrostatic chuck and preparation method thereof
一种氮化铝陶瓷静电卡盘及其制备方法
CHEN SHUSHU (author) / LI JUN (author) / SHI ZHEYUAN (author) / XIAO WEI (author)
2024-07-05
Patent
Electronic Resource
Chinese
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