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Water-based slurry tape casting in-situ nitriding synthesized silicon nitride ceramic substrate biscuit and preparation method thereof
The invention relates to a water-based slurry tape casting in-situ nitridation synthesized silicon nitride ceramic substrate biscuit and a preparation method thereof.The water-based slurry tape casting in-situ nitridation synthesized silicon nitride ceramic substrate biscuit comprises, by mass, 40-45% of ceramic powder, 0.5-1.0% of a water-based dispersing agent, 8-16% of an adhesive, 0-8% of a water-based plasticizer and 40-50% of deionized water, the ceramic powder is composed of silicon powder, a magnesium oxide sintering aid and a yttrium oxide sintering aid, and the water-based dispersing agent is composed of silicon powder, a magnesium oxide sintering aid and a yttrium oxide sintering aid. The weight ratio of the silicon powder to the magnesium oxide sintering aid to the yttrium oxide sintering aid is 93: 5: 2, and the preparation method comprises the following steps: magnetically stirring and mixing the silicon powder, the sintering aid, the dispersing agent, the adhesive, the plasticizer and the solvent to obtain slurry; and carrying out vacuum defoaming treatment, and carrying out tape casting to obtain a tape-cast sheet. According to the invention, a new adhesive system is introduced into the raw material ratio, so that the problems that defects are easy to occur during water-based drying and the silicon nitride ceramic substrate biscuit is poor in flexibility are solved, the drying speed of the water-based cast sheet is remarkably increased, the production cost is reduced, and the production environment is optimized.
本发明涉及一种水基浆料流延成型原位氮化合成氮化硅陶瓷基板素坯及其制备方法，按照质量百分比计，包括陶瓷粉体40～45wt%、水基分散剂0.5～1.0wt%、粘接剂8～16wt%、水基增塑剂0～8wt%，去离子水40～50wt%，所述的陶瓷粉体包由硅粉体、氧化镁烧结助剂和氧化钇烧结助剂组成，所述的硅粉体、氧化镁烧结助剂和氧化钇烧结助剂的重量百分比为93:5:2，其制备方法：将硅粉、烧结助剂、分散剂、粘接剂、增塑剂和溶剂，磁力搅拌混合，得到浆料；真空脱泡处理后用流延成型制得流延片。本发明通过在原料配比中引入新的粘接剂体系，改善水基干燥易出现缺陷和氮化硅陶瓷基板素坯柔韧性差的问题，显著提高水基流延片干燥速度，降低生产成本，优化生产环境。
Water-based slurry tape casting in-situ nitriding synthesized silicon nitride ceramic substrate biscuit and preparation method thereof
The invention relates to a water-based slurry tape casting in-situ nitridation synthesized silicon nitride ceramic substrate biscuit and a preparation method thereof.The water-based slurry tape casting in-situ nitridation synthesized silicon nitride ceramic substrate biscuit comprises, by mass, 40-45% of ceramic powder, 0.5-1.0% of a water-based dispersing agent, 8-16% of an adhesive, 0-8% of a water-based plasticizer and 40-50% of deionized water, the ceramic powder is composed of silicon powder, a magnesium oxide sintering aid and a yttrium oxide sintering aid, and the water-based dispersing agent is composed of silicon powder, a magnesium oxide sintering aid and a yttrium oxide sintering aid. The weight ratio of the silicon powder to the magnesium oxide sintering aid to the yttrium oxide sintering aid is 93: 5: 2, and the preparation method comprises the following steps: magnetically stirring and mixing the silicon powder, the sintering aid, the dispersing agent, the adhesive, the plasticizer and the solvent to obtain slurry; and carrying out vacuum defoaming treatment, and carrying out tape casting to obtain a tape-cast sheet. According to the invention, a new adhesive system is introduced into the raw material ratio, so that the problems that defects are easy to occur during water-based drying and the silicon nitride ceramic substrate biscuit is poor in flexibility are solved, the drying speed of the water-based cast sheet is remarkably increased, the production cost is reduced, and the production environment is optimized.
本发明涉及一种水基浆料流延成型原位氮化合成氮化硅陶瓷基板素坯及其制备方法，按照质量百分比计，包括陶瓷粉体40～45wt%、水基分散剂0.5～1.0wt%、粘接剂8～16wt%、水基增塑剂0～8wt%，去离子水40～50wt%，所述的陶瓷粉体包由硅粉体、氧化镁烧结助剂和氧化钇烧结助剂组成，所述的硅粉体、氧化镁烧结助剂和氧化钇烧结助剂的重量百分比为93:5:2，其制备方法：将硅粉、烧结助剂、分散剂、粘接剂、增塑剂和溶剂，磁力搅拌混合，得到浆料；真空脱泡处理后用流延成型制得流延片。本发明通过在原料配比中引入新的粘接剂体系，改善水基干燥易出现缺陷和氮化硅陶瓷基板素坯柔韧性差的问题，显著提高水基流延片干燥速度，降低生产成本，优化生产环境。
Water-based slurry tape casting in-situ nitriding synthesized silicon nitride ceramic substrate biscuit and preparation method thereof
一种水基浆料流延成型原位氮化合成氮化硅陶瓷基板素坯及其制备方法
MA CHENGLIANG (author) / FU JIE (author) / LIU YUAN (author) / ZHAO ZHENWEI (author) / LIU YUANFEI (author) / LI XIANG (author) / LI SI (author) / KONG YUAN (author) / YANG LUJUN (author) / WANG ANXIU (author)
2024-09-03
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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