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Molybdenum slurry for aluminum nitride ceramic electrostatic chuck and preparation method thereof
The invention discloses molybdenum slurry for an aluminum nitride ceramic electrostatic chuck and a preparation method of the molybdenum slurry, and belongs to the technical field of electrostatic chucks, the molybdenum slurry comprises the following components in percentage by mass: 70%-85% of molybdenum powder, 5%-10% of aluminum nitride powder and 10%-20% of an organic carrier; the method comprises the following steps that firstly, molybdenum powder, aluminum nitride powder and terpilenol are weighed in proportion and then put into a ball milling tank, a proper amount of dispersing agent and terpilenol are added, ball milling treatment is conducted, and molybdenum slurry dispersion liquid is obtained; 2, weighing a binder, a plasticizer and a solvent according to a ratio, putting the weighed materials into a stirring and dissolving container, stirring until the binder is completely dissolved, uniformly dispersing, cooling, and sealing and storing; and 3, adding the liquid sealed and stored in the step 2 into the molybdenum slurry dispersion liquid obtained in the step 1 according to a proportion, carrying out ball milling treatment, pouring the slurry subjected to ball milling and mixing into a three-roller mill, and carrying out rolling milling for 6-9 times to prepare the molybdenum slurry.
本发明公开了一种氮化铝陶瓷静电卡盘用钼浆及其制备方法，属于静电卡盘技术领域，所述钼浆按照质量百分比包括：70％～85％的钼粉、5～10％的氮化铝粉、10％～20％的有机载体；所述方法包括以下步骤：步骤一：将钼粉、氮化铝粉和松油醇按比例称量后放入球磨罐中，加入适量的分散剂和松油醇后进行球磨处理，得到钼浆分散液；步骤二：将粘结剂、增塑剂和溶剂，按照比例称量后放入搅拌溶解容器中进行搅拌，搅拌至粘结剂完全溶解，均匀分散降温后密封保存；步骤三：将上述步骤二中的密封保存的液体按照比例加入步骤一中得到的钼浆分散液中，进行球磨处理，将球磨混合后的浆料，倒入三辊轧磨机，进行6～9次扎磨，制得钼浆。
Molybdenum slurry for aluminum nitride ceramic electrostatic chuck and preparation method thereof
The invention discloses molybdenum slurry for an aluminum nitride ceramic electrostatic chuck and a preparation method of the molybdenum slurry, and belongs to the technical field of electrostatic chucks, the molybdenum slurry comprises the following components in percentage by mass: 70%-85% of molybdenum powder, 5%-10% of aluminum nitride powder and 10%-20% of an organic carrier; the method comprises the following steps that firstly, molybdenum powder, aluminum nitride powder and terpilenol are weighed in proportion and then put into a ball milling tank, a proper amount of dispersing agent and terpilenol are added, ball milling treatment is conducted, and molybdenum slurry dispersion liquid is obtained; 2, weighing a binder, a plasticizer and a solvent according to a ratio, putting the weighed materials into a stirring and dissolving container, stirring until the binder is completely dissolved, uniformly dispersing, cooling, and sealing and storing; and 3, adding the liquid sealed and stored in the step 2 into the molybdenum slurry dispersion liquid obtained in the step 1 according to a proportion, carrying out ball milling treatment, pouring the slurry subjected to ball milling and mixing into a three-roller mill, and carrying out rolling milling for 6-9 times to prepare the molybdenum slurry.
本发明公开了一种氮化铝陶瓷静电卡盘用钼浆及其制备方法，属于静电卡盘技术领域，所述钼浆按照质量百分比包括：70％～85％的钼粉、5～10％的氮化铝粉、10％～20％的有机载体；所述方法包括以下步骤：步骤一：将钼粉、氮化铝粉和松油醇按比例称量后放入球磨罐中，加入适量的分散剂和松油醇后进行球磨处理，得到钼浆分散液；步骤二：将粘结剂、增塑剂和溶剂，按照比例称量后放入搅拌溶解容器中进行搅拌，搅拌至粘结剂完全溶解，均匀分散降温后密封保存；步骤三：将上述步骤二中的密封保存的液体按照比例加入步骤一中得到的钼浆分散液中，进行球磨处理，将球磨混合后的浆料，倒入三辊轧磨机，进行6～9次扎磨，制得钼浆。
Molybdenum slurry for aluminum nitride ceramic electrostatic chuck and preparation method thereof
一种氮化铝陶瓷静电卡盘用钼浆及其制备方法
HONG GUOZHI (author) / SHI ZHEYUAN (author) / LI JUN (author) / XIAO WEI (author)
2024-07-30
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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