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Manufacturing method of silicon carbide boat support
The invention discloses a manufacturing method of a silicon carbide boat support, which comprises the following steps: S1, mixing raw materials: uniformly mixing silicon carbide powder and a high-temperature-resistant binder according to a certain proportion, adding a proper amount of sintering aid into the mixture, and mixing and grinding to prepare slurry; s2, blank forming: adopting a slip casting process to obtain a boat support splitting part blank, performing natural drying and hot air drying on the blank to discharge moisture, then fettling and carving the blank into a boat support splitting part semi-finished product meeting the size requirement, and performing high-temperature purification sintering on the semi-finished product in an induction furnace at the temperature of 2000-2300 DEG C under the protection of inert gas to obtain the boat support splitting part. Obtaining a silicon carbide boat support splitting part biscuit; and S3, splicing and sintering: splicing the silicon carbide boat support split part biscuits, feeding the spliced whole boat support into a vacuum furnace, carrying out high-temperature siliconizing sintering treatment at 1650-1700 DEG C, and carrying out grinding, sand blasting, fine cleaning, impurity removal, ultrasonic cleaning and drying process treatment after discharging to obtain the silicon carbide boat support.
本发明公开了一种碳化硅舟托的制造方法，包括以下步骤：S1、原材料混合：将碳化硅粉末与耐高温粘结剂按照一定的比例混合均匀，将适量的烧结助剂添加到混合物中，混合研磨制备泥浆；S2、毛坯成型：采用注浆成型工艺获得舟托拆分部件毛坯，坯体通过自然干燥、热风干燥排出水分后修坯雕刻成符合尺寸要求的舟托拆分部件半成品，半成品进入感应炉经过温度2000‑2300℃在惰性气体保护下高温纯化烧结，即得碳化硅舟托拆分部件素坯；S3、拼接烧结：将碳化硅舟托拆分部件素坯进行拼接，拼接成完整的舟托后送入真空炉经过1650～1700℃高温渗硅烧结处理，出窑后经过研磨、喷砂、精洗、除杂和超声波清洗、干燥工艺处理，得到碳化硅舟托。
Manufacturing method of silicon carbide boat support
The invention discloses a manufacturing method of a silicon carbide boat support, which comprises the following steps: S1, mixing raw materials: uniformly mixing silicon carbide powder and a high-temperature-resistant binder according to a certain proportion, adding a proper amount of sintering aid into the mixture, and mixing and grinding to prepare slurry; s2, blank forming: adopting a slip casting process to obtain a boat support splitting part blank, performing natural drying and hot air drying on the blank to discharge moisture, then fettling and carving the blank into a boat support splitting part semi-finished product meeting the size requirement, and performing high-temperature purification sintering on the semi-finished product in an induction furnace at the temperature of 2000-2300 DEG C under the protection of inert gas to obtain the boat support splitting part. Obtaining a silicon carbide boat support splitting part biscuit; and S3, splicing and sintering: splicing the silicon carbide boat support split part biscuits, feeding the spliced whole boat support into a vacuum furnace, carrying out high-temperature siliconizing sintering treatment at 1650-1700 DEG C, and carrying out grinding, sand blasting, fine cleaning, impurity removal, ultrasonic cleaning and drying process treatment after discharging to obtain the silicon carbide boat support.
本发明公开了一种碳化硅舟托的制造方法，包括以下步骤：S1、原材料混合：将碳化硅粉末与耐高温粘结剂按照一定的比例混合均匀，将适量的烧结助剂添加到混合物中，混合研磨制备泥浆；S2、毛坯成型：采用注浆成型工艺获得舟托拆分部件毛坯，坯体通过自然干燥、热风干燥排出水分后修坯雕刻成符合尺寸要求的舟托拆分部件半成品，半成品进入感应炉经过温度2000‑2300℃在惰性气体保护下高温纯化烧结，即得碳化硅舟托拆分部件素坯；S3、拼接烧结：将碳化硅舟托拆分部件素坯进行拼接，拼接成完整的舟托后送入真空炉经过1650～1700℃高温渗硅烧结处理，出窑后经过研磨、喷砂、精洗、除杂和超声波清洗、干燥工艺处理，得到碳化硅舟托。
Manufacturing method of silicon carbide boat support
一种碳化硅舟托的制造方法
HOU CHUNGUANG (author) / YU YONGQI (author) / WU GUOXIANG (author)
2024-11-26
Patent
Electronic Resource
Chinese
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