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Test sample of ceramic material micro-nano component and preparation method of test sample
The invention belongs to the field of preparation of ceramic material micro-nano devices, and particularly relates to a test sample of a ceramic material micro-nano component and a preparation method of the test sample, which are suitable for efficient processing, development and application of ceramic and semiconductor material micro-nano devices. The test sample of the ceramic material micro-nano component comprises a test beam, a base and a connecting part which are formed on the same ceramic material, the test beam is supported on the base through the connecting part, and the connecting part is connected to at least one end of the test beam. By the adoption of the technical scheme, large-size and high-precision ceramic material and semiconductor material micro-nano components can be efficiently prepared. The obtained micro-nano component sample can be used for in-situ scanning electron microscope mechanical property characterization and microstructure observation.
本发明属于陶瓷材料的微纳器件制备领域，具体为一种陶瓷材料微纳部件的测试样品及其制备方法，适用于面向陶瓷及半导体材料微纳米器件的高效加工与开发应用。其中，陶瓷材料微纳部件的测试样品包括：成型于同一陶瓷材料上的测试梁、基座和连接部；所述测试梁通过所述连接部支撑在所述基座上，所述连接部连接于所述测试梁的至少一端。采用本发明的技术方案，可高效制备大尺寸、高精度的陶瓷材料及半导体材料微纳部件。所得微纳部件样品可用于原位扫描电镜力学性能表征和显微结构观察。
Test sample of ceramic material micro-nano component and preparation method of test sample
The invention belongs to the field of preparation of ceramic material micro-nano devices, and particularly relates to a test sample of a ceramic material micro-nano component and a preparation method of the test sample, which are suitable for efficient processing, development and application of ceramic and semiconductor material micro-nano devices. The test sample of the ceramic material micro-nano component comprises a test beam, a base and a connecting part which are formed on the same ceramic material, the test beam is supported on the base through the connecting part, and the connecting part is connected to at least one end of the test beam. By the adoption of the technical scheme, large-size and high-precision ceramic material and semiconductor material micro-nano components can be efficiently prepared. The obtained micro-nano component sample can be used for in-situ scanning electron microscope mechanical property characterization and microstructure observation.
本发明属于陶瓷材料的微纳器件制备领域，具体为一种陶瓷材料微纳部件的测试样品及其制备方法，适用于面向陶瓷及半导体材料微纳米器件的高效加工与开发应用。其中，陶瓷材料微纳部件的测试样品包括：成型于同一陶瓷材料上的测试梁、基座和连接部；所述测试梁通过所述连接部支撑在所述基座上，所述连接部连接于所述测试梁的至少一端。采用本发明的技术方案，可高效制备大尺寸、高精度的陶瓷材料及半导体材料微纳部件。所得微纳部件样品可用于原位扫描电镜力学性能表征和显微结构观察。
Test sample of ceramic material micro-nano component and preparation method of test sample
陶瓷材料微纳部件的测试样品及其制备方法
SHI YING (author) / ZHANG CHENYUN (author) / ZHANG LEI (author) / XIE JIANJUN (author)
2024-12-27
Patent
Electronic Resource
Chinese
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