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PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ELEMENT, AND MANUFACTURING METHOD THEREOF
Provided are a piezoelectric thin film having good piezoelectricity in which a rhombohedral structure and a tetragonal structure are mixed, and a piezoelectric element using the piezoelectric thin film. The piezoelectric thin film includes a perovskite type metal oxide, in which the perovskite type metal oxide is a mixed crystal system of at least a rhombohedral structure and a tetragonal structure, and a ratio between an a-axis lattice parameter and a c-axis lattice parameter of the tetragonal structure satisfies 1.15≦c/a≦1.30. The piezoelectric element includes on a substrate: the above-mentioned piezoelectric thin film; and a pair of electrodes provided in contact with the piezoelectric thin film.
PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ELEMENT, AND MANUFACTURING METHOD THEREOF
Provided are a piezoelectric thin film having good piezoelectricity in which a rhombohedral structure and a tetragonal structure are mixed, and a piezoelectric element using the piezoelectric thin film. The piezoelectric thin film includes a perovskite type metal oxide, in which the perovskite type metal oxide is a mixed crystal system of at least a rhombohedral structure and a tetragonal structure, and a ratio between an a-axis lattice parameter and a c-axis lattice parameter of the tetragonal structure satisfies 1.15≦c/a≦1.30. The piezoelectric element includes on a substrate: the above-mentioned piezoelectric thin film; and a pair of electrodes provided in contact with the piezoelectric thin film.
PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ELEMENT, AND MANUFACTURING METHOD THEREOF
PIEZOELEKTRISCHE DÜNNSCHICHT, PIEZOELEKTRISCHES ELEMENT UND HERSTELLUNGSVERFAHREN DAFÜR
COUCHE MINCE PIÉZOÉLECTRIQUE, ÉLÉMENT PIÉZOÉLECTRIQUE ET PROCÉDÉ DE FABRICATION DE L'ÉLÉMENT PIÉZOÉLECTRIQUE
KUBOTA MAKOTO (author) / TAKEDA KENICHI (author) / HAYASHI JUMPEI (author) / SHIMADA MIKIO (author) / SHIMAKAWA YUICHI (author) / AZUMA MASAKI (author) / NAKAMURA YOSHITAKA (author) / KAWAI MASANORI (author)
2016-08-17
Patent
Electronic Resource
English
Piezoelectric thin film, piezoelectric element, and manufacturing method thereof
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