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    Piezoelectric thin film, piezoelectric thin film device, target, and methods for manufacturing piezoelectric thin film and piezoelectric thin film device

    New search for: IKEUCHI SHINSUKE
    New search for: YONEDA TOSHIMARO
    New search for: MATSUKI YOSHITAKA
    New search for: ENDO NAOYUKI

    A piezoelectric thin film does not easily generate a heterogeneous phase and exhibits good piezoelectric characteristics. The piezoelectric thin film contains a composition represented by a general formula: (1-n) (K1-xNax)mNbO3-nCaTiO3, wherein m, n, and x in the general formula are within the ranges of 0.87≤m≤0.97, 0≤n≤0.065, and 0≤x≤1.

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    Piezoelectric thin film, piezoelectric thin film device, target, and methods for manufacturing piezoelectric thin film and piezoelectric thin film device

    New search for: IKEUCHI SHINSUKE
    New search for: YONEDA TOSHIMARO
    New search for: MATSUKI YOSHITAKA
    New search for: ENDO NAOYUKI

    A piezoelectric thin film does not easily generate a heterogeneous phase and exhibits good piezoelectric characteristics. The piezoelectric thin film contains a composition represented by a general formula: (1-n) (K1-xNax)mNbO3-nCaTiO3, wherein m, n, and x in the general formula are within the ranges of 0.87≤m≤0.97, 0≤n≤0.065, and 0≤x≤1.

    Access

    Download

    Piezoelectric thin film, piezoelectric thin film device, target, and methods for manufacturing piezoelectric thin film and piezoelectric thin film device

    New search for: IKEUCHI SHINSUKE
    New search for: YONEDA TOSHIMARO
    New search for: MATSUKI YOSHITAKA
    New search for: ENDO NAOYUKI

    A piezoelectric thin film does not easily generate a heterogeneous phase and exhibits good piezoelectric characteristics. The piezoelectric thin film contains a composition represented by a general formula: (1-n) (K1-xNax)mNbO3-nCaTiO3, wherein m, n, and x in the general formula are within the ranges of 0.87≤m≤0.97, 0≤n≤0.065, and 0≤x≤1.

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    Download

    Access

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    Document information
    Title:

    Piezoelectric thin film, piezoelectric thin film device, target, and methods for manufacturing piezoelectric thin film and piezoelectric thin film device

    Contributors:

    IKEUCHI SHINSUKE (author) / YONEDA TOSHIMARO (author) / MATSUKI YOSHITAKA (author) / ENDO NAOYUKI (author)

    Publication date:

    2019-06-04

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  H10N / C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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