A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Method for annealing of aluminium nitride wafer
Fabrication of doped and undoped stoichiometric polycrystalline AlN ceramics with high purity is accomplished by, for example, reacting Al pellets with nitrogen gas. Such polycrystalline AlN ceramics may be utilized in the fabrication of high purity AlN single crystals, which may be annealed to enhance a conductivity thereof.
Method for annealing of aluminium nitride wafer
Fabrication of doped and undoped stoichiometric polycrystalline AlN ceramics with high purity is accomplished by, for example, reacting Al pellets with nitrogen gas. Such polycrystalline AlN ceramics may be utilized in the fabrication of high purity AlN single crystals, which may be annealed to enhance a conductivity thereof.
Method for annealing of aluminium nitride wafer
Verfahren zum Glühen eines Aluminiumnitrid-Wafers
Procédé de recuit de tranche de nitrure d'aluminium
MORGAN KENNETH E (author) / SCHOWALTER LEO J (author) / SLACK GLEN A (author)
2019-10-30
Patent
Electronic Resource
English
METHOD FOR MANUFACTURING ALUMINUM NITRIDE WAFER, AND THE ALUMINUM NITRIDE WAFER
| European Patent Office | 2021
METHOD FOR MAKING ALUMINUM NITRIDE WAFER AND ALUMINUM NITRIDE WAFER MADE BY THE SAME
| European Patent Office | 2021
METHOD FOR MAKING ALUMINUM NITRIDE WAFER AND ALUMINUM NITRIDE WAFER MADE BY THE SAME
European Patent Office | 2022
Effect of rapid thermal annealing of sputtered aluminium nitride film in an oxygen ambient
| British Library Online Contents | 2006
| British Library Online Contents | 2017