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DIELECTRIC THIN FILM, CAPACITOR ELEMENT, AND ELECTRONIC COMPONENT
[Problem] To provide a dielectric thin film with which high relative permittivity and high insulation can both be established even if the amount of nitrogen contained in a metal oxynitride is controlled to be low. [Solution] A dielectric thin film, which is obtained from a dielectric composition having a perovskite structure, wherein the dielectric composition is a metal oxynitride solid solution comprising Ma and Mb: which has a composition represented by the chemical formula MazMbOxNy (Ma is at least one kind of element selected from Sr, Ba, Ca, La, Ce, Pr, Nd, and Na, Mb is at least one kind of element selected from Ta, Nb, Ti and W, O is oxygen, and N is nitrogen); and in which, when a is the ionic valence exhibited when Ma occupies an A site in the perovskite structure and b is the ionic valence exhibited when Mb occupies a B site in the perovskite structure, a and b are such that 6.7 ¤ a+b ¤ 7.3, and x, y and z are such that 0.8 ¤ z ¤ 1.2, 2.450 ¤ x ¤ 3.493, and 0.005 ¤ y ¤ 0.700.
DIELECTRIC THIN FILM, CAPACITOR ELEMENT, AND ELECTRONIC COMPONENT
[Problem] To provide a dielectric thin film with which high relative permittivity and high insulation can both be established even if the amount of nitrogen contained in a metal oxynitride is controlled to be low. [Solution] A dielectric thin film, which is obtained from a dielectric composition having a perovskite structure, wherein the dielectric composition is a metal oxynitride solid solution comprising Ma and Mb: which has a composition represented by the chemical formula MazMbOxNy (Ma is at least one kind of element selected from Sr, Ba, Ca, La, Ce, Pr, Nd, and Na, Mb is at least one kind of element selected from Ta, Nb, Ti and W, O is oxygen, and N is nitrogen); and in which, when a is the ionic valence exhibited when Ma occupies an A site in the perovskite structure and b is the ionic valence exhibited when Mb occupies a B site in the perovskite structure, a and b are such that 6.7 ¤ a+b ¤ 7.3, and x, y and z are such that 0.8 ¤ z ¤ 1.2, 2.450 ¤ x ¤ 3.493, and 0.005 ¤ y ¤ 0.700.
DIELECTRIC THIN FILM, CAPACITOR ELEMENT, AND ELECTRONIC COMPONENT
DIELEKTRISCHE DÜNNSCHICHT, KONDENSATORELEMENT UND ELEKTRONISCHE KOMPONENTE
FILM MINCE DIÉLECTRIQUE, ÉLÉMENT DE CONDENSATEUR, ET COMPOSANT ÉLECTRONIQUE
YAMAZAKI KUMIKO (author) / NAKAHATA ISAO (author)
2019-05-15
Patent
Electronic Resource
English
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