A platform for research: civil engineering, architecture and urbanism
DIELECTRIC THIN FILM, CAPACITOR ELEMENT, AND ELECTRONIC COMPONENT
A dielectric thin film with high relative permittivity and high insulation can establish the amount of nitrogen in a metal oxynitride to be low. A dielectric thin film, wherein the dielectric composition is a metal oxynitride solid solution including Ma and Mb: a composition represented by the chemical formula MazMbOxNy (Ma is one element selected from Sr, Ba, Ca, La, Ce, Pr, Nd, and Na, Mb is one element selected from Ta, Nb, Ti and W, O is oxygen, and N is nitrogen); when a is the ionic valence exhibited when Ma occupies an A site in the perovskite structure and b is the ionic valence exhibited when Mb occupies a B site in the perovskite structure, a and b are 6.7≤a+b≤7.3, and x, y and z are 0.8≤z≤1.2, 2.450≤x≤3.493, and 0.005≤y≤0.700.
DIELECTRIC THIN FILM, CAPACITOR ELEMENT, AND ELECTRONIC COMPONENT
A dielectric thin film with high relative permittivity and high insulation can establish the amount of nitrogen in a metal oxynitride to be low. A dielectric thin film, wherein the dielectric composition is a metal oxynitride solid solution including Ma and Mb: a composition represented by the chemical formula MazMbOxNy (Ma is one element selected from Sr, Ba, Ca, La, Ce, Pr, Nd, and Na, Mb is one element selected from Ta, Nb, Ti and W, O is oxygen, and N is nitrogen); when a is the ionic valence exhibited when Ma occupies an A site in the perovskite structure and b is the ionic valence exhibited when Mb occupies a B site in the perovskite structure, a and b are 6.7≤a+b≤7.3, and x, y and z are 0.8≤z≤1.2, 2.450≤x≤3.493, and 0.005≤y≤0.700.
DIELECTRIC THIN FILM, CAPACITOR ELEMENT, AND ELECTRONIC COMPONENT
YAMAZAKI KUMIKO (author) / NAKAHATA ISAO (author)
2018-10-04
Patent
Electronic Resource
English
DIELECTRIC THIN FILM, CAPACITOR ELEMENT, AND ELECTRONIC COMPONENT
European Patent Office | 2017
|Dielectric thin film, capacitor element, and electronic component
European Patent Office | 2019
|DIELECTRIC THIN FILM, CAPACITOR ELEMENT, AND ELECTRONIC COMPONENT
European Patent Office | 2019
|DIELECTRIC THIN FILM, ELECTRONIC COMPONENT, THIN FILM CAPACITOR, AND ELECTRONIC CIRCUIT BOARD
European Patent Office | 2020
|DIELECTRIC THIN FILM, ELECTRONIC COMPONENT, THIN FILM CAPACITOR AND ELECTRONIC CIRCUIT BOARD
European Patent Office | 2020
|