A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
POLYCRYSTALLINE DIELECTRIC THIN FILM AND CAPACITOR ELEMENT
[Problem] To provide a polycrystalline dielectric thin film and capacitor element having a small dielectric loss tan ´. [Solution] A polycrystalline dielectric thin film, in which the main composition is a perovskite oxynitride. The perovskite oxynitride is expressed by the compositional formula AaBbOoNn (a+b+o+n = 5), where a/b > 1 and n ¥ 0.7.
POLYCRYSTALLINE DIELECTRIC THIN FILM AND CAPACITOR ELEMENT
[Problem] To provide a polycrystalline dielectric thin film and capacitor element having a small dielectric loss tan ´. [Solution] A polycrystalline dielectric thin film, in which the main composition is a perovskite oxynitride. The perovskite oxynitride is expressed by the compositional formula AaBbOoNn (a+b+o+n = 5), where a/b > 1 and n ¥ 0.7.
POLYCRYSTALLINE DIELECTRIC THIN FILM AND CAPACITOR ELEMENT
POLYKRISTALLINE DIELEKTRISCHE DÜNNSCHICHT UND KONDENSATORELEMENT
FILM DIÉLECTRIQUE MINCE POLYCRISTALLIN ET ÉLÉMENT CONDENSATEUR
YAMAZAKI KUMIKO (author) / CHIHARA HIROSHI (author) / NAGAMINE YUKI (author) / YAMAZAKI JUNICHI (author)
2019-08-14
Patent
Electronic Resource
English
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