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Polycrystalline dielectric thin film and capacitor element
A polycrystalline dielectric thin film and capacitor element has a small dielectric loss tan δ. The polycrystalline dielectric thin film, in which the main composition is a perovskite oxynitride. The perovskite oxynitride is expressed by the compositional formula AaBbOoNn (a+b+o+n=5), where a/b>1 and n≥0.7.
Polycrystalline dielectric thin film and capacitor element
A polycrystalline dielectric thin film and capacitor element has a small dielectric loss tan δ. The polycrystalline dielectric thin film, in which the main composition is a perovskite oxynitride. The perovskite oxynitride is expressed by the compositional formula AaBbOoNn (a+b+o+n=5), where a/b>1 and n≥0.7.
Polycrystalline dielectric thin film and capacitor element
YAMAZAKI KUMIKO (author) / CHIHARA HIROSHI (author) / NAGAMINE YUKI (author) / YAMAZAKI JUNICHI (author)
2020-04-07
Patent
Electronic Resource
English
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