A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
POTASSIUM SODIUM NIOBATE SPUTTERING TARGET AND METHOD FOR PRODUCING SAME
A potassium sodium niobate sputtering target having a relative density of 95% or higher. A method of producing a potassium sodium niobate sputtering target, including the steps of mixing a Nb2O5powder, a K2Co3powder, and a Na2Co3powder, pulverizing the mixed powder to achieve a grain size d50of 100 µm or less, and performing hot press sintering to the obtained pulverized powder in an inert gas or vacuum atmosphere under conditions of a temperature of 900°C or higher and less than 1150°C, and a load of 150 to 400 kgf/cm2. The present invention aims to provide a high density potassium sodium niobate sputtering target capable of industrially depositing potassium sodium niobate films via the sputtering method.
POTASSIUM SODIUM NIOBATE SPUTTERING TARGET AND METHOD FOR PRODUCING SAME
A potassium sodium niobate sputtering target having a relative density of 95% or higher. A method of producing a potassium sodium niobate sputtering target, including the steps of mixing a Nb2O5powder, a K2Co3powder, and a Na2Co3powder, pulverizing the mixed powder to achieve a grain size d50of 100 µm or less, and performing hot press sintering to the obtained pulverized powder in an inert gas or vacuum atmosphere under conditions of a temperature of 900°C or higher and less than 1150°C, and a load of 150 to 400 kgf/cm2. The present invention aims to provide a high density potassium sodium niobate sputtering target capable of industrially depositing potassium sodium niobate films via the sputtering method.
POTASSIUM SODIUM NIOBATE SPUTTERING TARGET AND METHOD FOR PRODUCING SAME
KALIUMNATRIUMNIOBAT-SPUTTERTARGET UND VERFAHREN ZUR HERSTELLUNG DAVON
CIBLE DE PULVÉRISATION DE SODIUM NIOBATE DE POTASSIUM ET SON PROCÉDÉ DE PRODUCTION
SAKASHITA RYOSUKE (author) / TAKAMURA HIROSHI (author) / NARA ATSUSHI (author) / SUZUKI RYO (author)
2023-07-19
Patent
Electronic Resource
English
POTASSIUM SODIUM NIOBATE SPUTTERING TARGET AND METHOD FOR PRODUCING SAME
| European Patent Office | 2019
POTASSIUM SODIUM NIOBATE SPUTTERING TARGET AND PRODUCTION METHOD THEREOF
| European Patent Office | 2024
Potassium sodium niobate sputtering target and production method thereof
| European Patent Office | 2025