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The present disclosure relates to a tantalum carbide coating material, and more specifically, to a tantalum carbide coating material comprising: a carbon substrate; and a tantalum carbide coating formed on the carbon substrate, wherein a thermal expansion coefficient difference between the carbon substrate and the tantalum carbide coating is 1.0 × 10-6/°C or more.
The present disclosure relates to a tantalum carbide coating material, and more specifically, to a tantalum carbide coating material comprising: a carbon substrate; and a tantalum carbide coating formed on the carbon substrate, wherein a thermal expansion coefficient difference between the carbon substrate and the tantalum carbide coating is 1.0 × 10-6/°C or more.
TANTALUM CARBIDE COATING MATERIAL
TANTALCARBID-BESCHICHTUNGSMATERIAL
MATÉRIAU DE REVÊTEMENT A BASE DE CARBURE DETANTALE
JO DONG WAN (author)
2020-06-24
Patent
Electronic Resource
English
TANTALUM CARBIDE COATING MATERIAL AND COMPOUND SEMICONDUCTOR GROWTH DEVICE
European Patent Office | 2024
|TANTALUM CARBIDE COATING MATERIAL AND COMPOUND SEMICONDUCTOR GROWTH DEVICE
European Patent Office | 2024
|European Patent Office | 2024
|