A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING OXIDE FILMS USING SAME
A Si-containing film forming composition comprising a catalyst and/or a polysilane and a N-H free, C-free, and Si-rich perhydropolysilazane having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton and comprising N-H free repeating units having the formula [-N(SiH3)x(SiH2-)y], wherein x=0, 1, or 2 and y= 0, 1, or 2 with x+y=2; and x= 0, 1 or 2 and y=1, 2, or 3 with x+y=3. Also disclosed are synthesis methods and applications for using the same.
L'invention concerne une composition de formation de film contenant du Si comprenant un catalyseur et/ou un polysilane et un perhydropolysilazane exempt de N-H, exempt de C, et riche en Si ayant un poids moléculaire allant d'environ 332 daltons à environ 100 000 daltons et comprenant des unités de répétition exemptes de N-H ayant la formule [-N(SiH3)x(SiH2-)y], où x = 0, 1, ou 2 et y = 0, 1, ou 2 avec x + y = 2 ; et x = 0, 1, ou 2 et y = 1, 2, ou 3 avec x + y = 3. L'invention concerne également des méthodes de synthèse et des applications permettant de les utiliser.
PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING OXIDE FILMS USING SAME
A Si-containing film forming composition comprising a catalyst and/or a polysilane and a N-H free, C-free, and Si-rich perhydropolysilazane having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton and comprising N-H free repeating units having the formula [-N(SiH3)x(SiH2-)y], wherein x=0, 1, or 2 and y= 0, 1, or 2 with x+y=2; and x= 0, 1 or 2 and y=1, 2, or 3 with x+y=3. Also disclosed are synthesis methods and applications for using the same.
L'invention concerne une composition de formation de film contenant du Si comprenant un catalyseur et/ou un polysilane et un perhydropolysilazane exempt de N-H, exempt de C, et riche en Si ayant un poids moléculaire allant d'environ 332 daltons à environ 100 000 daltons et comprenant des unités de répétition exemptes de N-H ayant la formule [-N(SiH3)x(SiH2-)y], où x = 0, 1, ou 2 et y = 0, 1, ou 2 avec x + y = 2 ; et x = 0, 1, ou 2 et y = 1, 2, ou 3 avec x + y = 3. L'invention concerne également des méthodes de synthèse et des applications permettant de les utiliser.
PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING OXIDE FILMS USING SAME
COMPOSITIONS DE PERHYDROPOLYSILAZANE ET MÉTHODES DE FORMATION DE FILMS D'OXYDE LES UTILISANT
SANCHEZ ANTONIO (author) / ITOV GENNADIY (author) / KHANDELWAL MANISH (author) / RITTER COLE (author) / ZHANG PENG (author) / GIRARD JEAN-MARC (author) / WAN ZHIWEN (author) / KUCHENBEISER GLENN (author) / ORBAN DAVID (author) / KERRIGAN SEAN (author)
2019-08-29
Patent
Electronic Resource
English
IPC:
C01B
NON-METALLIC ELEMENTS
,
Nichtmetallische Elemente
/
C04B
Kalk
,
LIME
/
C07F
Acyclische, carbocyclische oder heterocyclische Verbindungen, die andere Elemente als Kohlenstoff, Wasserstoff, Halogen, Sauerstoff, Stickstoff, Schwefel, Selen oder Tellur enthalten
,
ACYCLIC, CARBOCYCLIC, OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
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