A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING NITRIDE FILMS USING SAME
Si-함유 막 형성 조성물은, 촉매 및/또는 폴리실란, 및 N-H 부재, C-부재, 그리고 Si가 풍부한 퍼하이드로폴리실라잔(상기 퍼하이드로폴리실라잔은 대략 332 달톤 내지 대략 100,000 달톤 범위의 분자량을 갖고 화학식 [-N(SiH3)x(SiH2-)y](여기서, x+y=2일 때 x=0, 1, 또는 2, 및 y=0, 1, 또는 2; 및 x+y=3일 때 x=0, 1 또는 2, 및 y=1, 2, 또는 3)를 갖는 N-H 부재 반복 단위를 포함함)을 포함한다. 또한, 합성 방법 및 이를 사용하기 위한 응용 분야가 개시된다.
A Si-containing film forming composition comprising a catalyst and/or a polysilane and a N—H free, C-free, and Si-rich perhydropolysilazane having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton and comprising N—H free repeating units having the formula [—N(SiH3)×(SiH2−)y], wherein x=0, 1, or 2 and y=0, 1, or 2 with x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 with x+y=3. Also disclosed are synthesis methods and applications for using the same.
PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING NITRIDE FILMS USING SAME
Si-함유 막 형성 조성물은, 촉매 및/또는 폴리실란, 및 N-H 부재, C-부재, 그리고 Si가 풍부한 퍼하이드로폴리실라잔(상기 퍼하이드로폴리실라잔은 대략 332 달톤 내지 대략 100,000 달톤 범위의 분자량을 갖고 화학식 [-N(SiH3)x(SiH2-)y](여기서, x+y=2일 때 x=0, 1, 또는 2, 및 y=0, 1, 또는 2; 및 x+y=3일 때 x=0, 1 또는 2, 및 y=1, 2, 또는 3)를 갖는 N-H 부재 반복 단위를 포함함)을 포함한다. 또한, 합성 방법 및 이를 사용하기 위한 응용 분야가 개시된다.
A Si-containing film forming composition comprising a catalyst and/or a polysilane and a N—H free, C-free, and Si-rich perhydropolysilazane having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton and comprising N—H free repeating units having the formula [—N(SiH3)×(SiH2−)y], wherein x=0, 1, or 2 and y=0, 1, or 2 with x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 with x+y=3. Also disclosed are synthesis methods and applications for using the same.
PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING NITRIDE FILMS USING SAME
퍼하이드로폴리실라잔 조성물 및 이를 사용하여 질화물 막을 형성하는 방법
SANCHEZ ANTONIO (author) / ITOV GENNADIY (author) / KHANDELWAL MANISH (author) / RITTER COLE (author) / ZHANG PENG (author) / GIRARD JEAN MARC (author) / WAN ZHIWEN (author) / KUCHENBEISER GLENN (author) / ORBAN DAVID (author) / KERRIGAN SEAN (author)
2022-05-24
Patent
Electronic Resource
Korean
IPC:
C09D
Überzugsmittel, z.B. Anstrichstoffe, Firnisse oder Lacke
,
COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS
/
C04B
Kalk
,
LIME
/
C08G
MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
,
Makromolekulare Verbindungen, anders erhalten als durch Reaktionen, an denen nur ungesättigte Kohlenstoff-Kohlenstoff-Bindungen beteiligt sind
/
C08L
COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
,
Massen auf Basis makromolekularer Verbindungen
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