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FERROELECTRIC THIN FILM, ELECTRONIC ELEMENT USING SAME, AND METHOD FOR MANUFACTURING FERROELECTRIC THIN FILM
It is an object to provide a ferroelectric thin film having much higher ferroelectric properties than conventional Sc-doped ferroelectric thin film constituted by aluminum nitride and also having stability when applied to practical use, and also to provide an electronic device using the same.There are provided a ferroelectric thin film represented by a chemical formula M11-XM2XN, wherein M1 is at least one element selected from Al and Ga, M2 is at least one element selected from Mg, Sc, Yb, and Nb, and X is within a range of 0 or more and 1 or less, and also an electronic device using the same.
FERROELECTRIC THIN FILM, ELECTRONIC ELEMENT USING SAME, AND METHOD FOR MANUFACTURING FERROELECTRIC THIN FILM
It is an object to provide a ferroelectric thin film having much higher ferroelectric properties than conventional Sc-doped ferroelectric thin film constituted by aluminum nitride and also having stability when applied to practical use, and also to provide an electronic device using the same.There are provided a ferroelectric thin film represented by a chemical formula M11-XM2XN, wherein M1 is at least one element selected from Al and Ga, M2 is at least one element selected from Mg, Sc, Yb, and Nb, and X is within a range of 0 or more and 1 or less, and also an electronic device using the same.
FERROELECTRIC THIN FILM, ELECTRONIC ELEMENT USING SAME, AND METHOD FOR MANUFACTURING FERROELECTRIC THIN FILM
FERROELEKTRISCHER DÜNNFILM, ELEKTRONISCHES ELEMENT DAMIT UND VERFAHREN ZUM HERSTELLEN EINES FERROELEKTRISCHEN DÜNNFILMS
FILM MINCE FERROÉLECTRIQUE, ÉLÉMENT ÉLECTRONIQUE L'UTILISANT ET PROCÉDÉ DE FABRICATION DE FILM MINCE FERROÉLECTRIQUE
UEHARA MASATO (author) / AKIYAMA MORITO (author) / YAMADA HIROSHI (author) / FUNAKUBO HIROSHI (author) / SHIMIZU TAKAO (author) / YASUOKA SHINNOSUKE (author)
2024-03-20
Patent
Electronic Resource
English
IPC:
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
C01B
NON-METALLIC ELEMENTS
,
Nichtmetallische Elemente
/
C01G
Verbindungen der von den Unterklassen C01D oder C01F nicht umfassten Metalle
,
COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
/
C04B
Kalk
,
LIME
/
C30B
SINGLE-CRYSTAL GROWTH
,
Züchten von Einkristallen
/
H10B
/
H10N
| European Patent Office | 2021
| European Patent Office | 2016
Ferroelectric film, electronic component using same, and method for manufacturing ferroelectric film
| European Patent Office | 2022
| European Patent Office | 2017