Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    FERROELECTRIC THIN FILM, METHOD FOR PRODUCING FERROELECTRIC THIN FILM, METHOD FOR PRODUCING PIEZOELECTRIC ELEMENT

    New search for: MAWATARI KENJI

    In order to obtain a ferroelectric thin film that is formed to have a predetermined thickness on a substrate, that have satisfactory crystallization and that achieves a high piezoelectric property, a method of manufacturing such a ferroelectric thin film and a method of manufacturing a piezoelectric element having such a ferroelectric thin film, when a dielectric material of a perovskite structure is formed into a film on the substrate, a predetermined amount of additive is mixed with PZT, and the concentration of the additive mixed is varied in the thickness direction of the thin film.

    Access

    Download

    Access

    Download

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    FERROELECTRIC THIN FILM, METHOD FOR PRODUCING FERROELECTRIC THIN FILM, METHOD FOR PRODUCING PIEZOELECTRIC ELEMENT

    New search for: MAWATARI KENJI

    In order to obtain a ferroelectric thin film that is formed to have a predetermined thickness on a substrate, that have satisfactory crystallization and that achieves a high piezoelectric property, a method of manufacturing such a ferroelectric thin film and a method of manufacturing a piezoelectric element having such a ferroelectric thin film, when a dielectric material of a perovskite structure is formed into a film on the substrate, a predetermined amount of additive is mixed with PZT, and the concentration of the additive mixed is varied in the thickness direction of the thin film.

    Access

    Download

    FERROELECTRIC THIN FILM, METHOD FOR PRODUCING FERROELECTRIC THIN FILM, METHOD FOR PRODUCING PIEZOELECTRIC ELEMENT

    New search for: MAWATARI KENJI

    In order to obtain a ferroelectric thin film that is formed to have a predetermined thickness on a substrate, that have satisfactory crystallization and that achieves a high piezoelectric property, a method of manufacturing such a ferroelectric thin film and a method of manufacturing a piezoelectric element having such a ferroelectric thin film, when a dielectric material of a perovskite structure is formed into a film on the substrate, a predetermined amount of additive is mixed with PZT, and the concentration of the additive mixed is varied in the thickness direction of the thin film.

    Access

    Download

    Access

    Download

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    FERROELECTRIC THIN FILM, METHOD FOR PRODUCING FERROELECTRIC THIN FILM, METHOD FOR PRODUCING PIEZOELECTRIC ELEMENT

    Additional title:

    FERROELEKTRISCHE DÜNNSCHICHT, VERFAHREN ZUR HERSTELLUNG DER FERROELEKTRISCHEN DÜNNSCHICHT UND VERFAHREN ZUR HERSTELLUNG EINES PIEZOELEKTRISCHEN ELEMENTS
    FILM MINCE FERROÉLECTRIQUE, SON PROCÉDÉ DE FABRICATION, ET PROCÉDÉ DE PRODUCTION D'UN ÉLÉMENT PIÉZOÉLECTRIQUE

    Contributors:

    MAWATARI KENJI (author)

    Publication date:

    2016-07-13

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B41J TYPEWRITERS , Schreibmaschinen / C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL

    Similar titles

    FERROELECTRIC THIN FILM, ELECTRONIC ELEMENT USING SAME, AND METHOD FOR MANUFACTURING FERROELECTRIC THIN FILM

    UEHARA MASATO / AKIYAMA MORITO / YAMADA HIROSHI et al. | European Patent Office | 2024

    Free access

    FERROELECTRIC THIN FILM, ELECTRONIC ELEMENT USING SAME, AND METHOD FOR MANUFACTURING FERROELECTRIC THIN FILM

    UEHARA MASATO / AKIYAMA MORITO / YAMADA HIROSHI et al. | European Patent Office | 2021

    Free access

    COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION METHOD FOR FERROELECTRIC THIN FILM FORMATION AND FERROELECTRIC THIN FILM FORMED BY THE METHOD

    European Patent Office | 2015

    Free access

    COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FERROELECTRIC THIN FILM FORMATION, AND FERROELECTRIC THIN FILM FORMED BY THE METHOD

    FUJII JUN / SAKURAI HIDEAKI / NOGUCHI TAKASHI et al. | European Patent Office | 2017

    Free access

    FERROELECTRIC THIN FILM

    SHIMADA MIKIO / AEBA TOSHIAKI / IFUKU TOSHIHIRO et al. | European Patent Office | 2016

    Free access
    Back to top