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ALUMINA SINTERED COMPACT AND ELECTROSTATIC DEFLECTOR INCLUDING THE SAME
PROBLEM TO BE SOLVED: To provide an alumina sintered compact ensuring high dielectric strength while having conductivity or semi-conductivity in the surface layer, and to provide an electrostatic deflector including the same.SOLUTION: An alumina sintered compact contains alumina as a main component, and contains at least any one of titanium and niobium as a metallic element, in which the content of metallic element in the surface layer is higher than the internal content of metallic element. A cylindrical substrate consisting of the alumina sintered compact, and an electrostatic deflector having a plurality of electrodes on the inner peripheral side of the cylindrical substrate are also provided.
【課題】 表層部において導電性または半導電性を有しつつ、絶縁耐力が高いアルミナ質焼結体およびこれを備える静電偏向器を提供する。【解決手段】 アルミナを主成分とし、金属元素としてチタンおよびニオブの少なくともいずれかを含んでなり、表層部における金属元素の含有量が、内部における金属元素の含有量よりも多いアルミナ質焼結体である。アルミナ質焼結体からなる筒状基体と、筒状基体の内周側に設けられた複数の電極とを備える静電偏向器である。【選択図】 図1
ALUMINA SINTERED COMPACT AND ELECTROSTATIC DEFLECTOR INCLUDING THE SAME
PROBLEM TO BE SOLVED: To provide an alumina sintered compact ensuring high dielectric strength while having conductivity or semi-conductivity in the surface layer, and to provide an electrostatic deflector including the same.SOLUTION: An alumina sintered compact contains alumina as a main component, and contains at least any one of titanium and niobium as a metallic element, in which the content of metallic element in the surface layer is higher than the internal content of metallic element. A cylindrical substrate consisting of the alumina sintered compact, and an electrostatic deflector having a plurality of electrodes on the inner peripheral side of the cylindrical substrate are also provided.
【課題】 表層部において導電性または半導電性を有しつつ、絶縁耐力が高いアルミナ質焼結体およびこれを備える静電偏向器を提供する。【解決手段】 アルミナを主成分とし、金属元素としてチタンおよびニオブの少なくともいずれかを含んでなり、表層部における金属元素の含有量が、内部における金属元素の含有量よりも多いアルミナ質焼結体である。アルミナ質焼結体からなる筒状基体と、筒状基体の内周側に設けられた複数の電極とを備える静電偏向器である。【選択図】 図1
ALUMINA SINTERED COMPACT AND ELECTROSTATIC DEFLECTOR INCLUDING THE SAME
アルミナ質焼結体およびこれを備える静電偏向器
ISHIKAWA KAZUHIRO (author)
2015-07-06
Patent
Electronic Resource
Japanese