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OXIDE SINTERED BODY AND PRODUCTION METHOD THEREOF, TARGET, AND TRANSPARENT CONDUCTIVE FILM
PROBLEM TO BE SOLVED: To provide a target for sputtering high rate film-formation and nodule-less film-formation of a transparent conductive film suitable for a blue LED and solar cell, oxide sintered body suitable for obtaining the same and a production method therefor.SOLUTION: An oxide sintered body comprises indium and cerium as an oxide, in which the content of cerium is 0.3 to 9 atom% as atom number ratio of Ce/(In+Ce). In the oxide sintered body, an InOphase with a bixbyite-type structure forms a major crystal phase, a CeOphase with a fluorite type structure as a second phase is finely dispersed therein, as a crystal grain having an average particle diameter of 3 μm or less. A production method of the oxide sintered body comprises the steps of: mixing the raw material powders comprising indium oxide powders and cerium oxide powders and having an average particle diameter of 1.5 μm or less; and compacting the mixed powders and sintering the compact by a normal pressure firing method, or compacting and sintering the mixed powders by a hot press method.
【課題】青色ＬＥＤや太陽電池に適した透明導電膜の高速成膜とノジュールレス成膜を実現できるスパッタリング用ターゲット、それを得るために最適な酸化物焼結体とその製造方法の提供。【解決手段】インジウムとセリウムの酸化物を含有からなり、セリウムの含有量がＣｅ／（Ｉｎ＋Ｃｅ）原子数比で０．３〜９原子％の酸化物焼結体であって、該酸化物焼結体は、ビックスバイト型構造のＩｎ２Ｏ３相が主たる結晶相となり、第２相として蛍石型構造のＣｅＯ２相が平均粒径３μｍ以下の結晶粒として微細に分散していることを特徴とする酸化物焼結体；酸化インジウム粉末と酸化セリウム粉末からなる、各々平均粒径１．５μｍ以下の原料粉末を混合した後、混合粉末を成形し、成形物を常圧焼結法によって焼結するか、あるいは混合粉末をホットプレス法によって成形し焼結する酸化物焼結体の製造方法などによって提供。【選択図】図１
OXIDE SINTERED BODY AND PRODUCTION METHOD THEREOF, TARGET, AND TRANSPARENT CONDUCTIVE FILM
PROBLEM TO BE SOLVED: To provide a target for sputtering high rate film-formation and nodule-less film-formation of a transparent conductive film suitable for a blue LED and solar cell, oxide sintered body suitable for obtaining the same and a production method therefor.SOLUTION: An oxide sintered body comprises indium and cerium as an oxide, in which the content of cerium is 0.3 to 9 atom% as atom number ratio of Ce/(In+Ce). In the oxide sintered body, an InOphase with a bixbyite-type structure forms a major crystal phase, a CeOphase with a fluorite type structure as a second phase is finely dispersed therein, as a crystal grain having an average particle diameter of 3 μm or less. A production method of the oxide sintered body comprises the steps of: mixing the raw material powders comprising indium oxide powders and cerium oxide powders and having an average particle diameter of 1.5 μm or less; and compacting the mixed powders and sintering the compact by a normal pressure firing method, or compacting and sintering the mixed powders by a hot press method.
【課題】青色ＬＥＤや太陽電池に適した透明導電膜の高速成膜とノジュールレス成膜を実現できるスパッタリング用ターゲット、それを得るために最適な酸化物焼結体とその製造方法の提供。【解決手段】インジウムとセリウムの酸化物を含有からなり、セリウムの含有量がＣｅ／（Ｉｎ＋Ｃｅ）原子数比で０．３〜９原子％の酸化物焼結体であって、該酸化物焼結体は、ビックスバイト型構造のＩｎ２Ｏ３相が主たる結晶相となり、第２相として蛍石型構造のＣｅＯ２相が平均粒径３μｍ以下の結晶粒として微細に分散していることを特徴とする酸化物焼結体；酸化インジウム粉末と酸化セリウム粉末からなる、各々平均粒径１．５μｍ以下の原料粉末を混合した後、混合粉末を成形し、成形物を常圧焼結法によって焼結するか、あるいは混合粉末をホットプレス法によって成形し焼結する酸化物焼結体の製造方法などによって提供。【選択図】図１
OXIDE SINTERED BODY AND PRODUCTION METHOD THEREOF, TARGET, AND TRANSPARENT CONDUCTIVE FILM
酸化物焼結体とその製造方法、ターゲット、および透明導電膜
NAKAYAMA NORIYUKI (author) / ABE TAKAYUKI (author)
2015-07-09
Patent
Electronic Resource
Japanese
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