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MANGANESE- AND NIOBIUM-DOPED PZT BASED PIEZOELECTRIC MATERIAL FILM
PROBLEM TO BE SOLVED: To provide a Mn- and Nb-doped PZT based piezoelectric material film high in piezoelectric constant, low in dielectric constant, and superior in stability after a polarization process.SOLUTION: A Mn- and Nb-doped PZT based piezoelectric material film comprises a Mn- and Nb-doped complex metal oxide. In the film, metal atoms' ratio (Pb:Mn:Nb:Zr:Ti) satisfies (0.98-1.12):(0.002-0.056):(0.002-0.056):(0.40-0.60):(0.40-0.60). If the total of Mn and Nb metal atoms' ratios is one (1), the proportion of Mn is 0.20-0.80. If the total of Zr and Ti metal atoms' ratios is one (1), the proportion of Zr is 0.40-0.60. If the total of Mn, Nb, Zr and Ti metal atoms' ratios is one (1), the total proportion of Zr and Ti is 0.9300-0.9902.
【課題】圧電定数が高く、誘電率が低く、更に分極処理後の安定性に優れたＭｎ及びＮｂドープのＰＺＴ系圧電体膜を提供する。【解決手段】Ｍｎ及びＮｂドープの複合金属酸化物からなり、膜中の金属原子比（Ｐｂ：Ｍｎ：Ｎｂ：Ｚｒ：Ｔｉ）が（０．９８〜１．１２）：（０．００２〜０．０５６）：（０．００２〜０．０５６）：（０．４０〜０．６０）：（０．４０〜０．６０）を満たし、かつＭｎ及びＮｂの金属原子比の合計を１としたときのＭｎの割合が０．２０〜０．８０、Ｚｒ及びＴｉの金属原子比の合計を１としたときのＺｒの割合が０．４０〜０．６０、Ｍｎ、Ｎｂ、Ｚｒ及びＴｉの金属原子比の合計を１としたときのＺｒ及びＴｉの合計割合が０．９３００〜０．９９０２である。【選択図】図１
MANGANESE- AND NIOBIUM-DOPED PZT BASED PIEZOELECTRIC MATERIAL FILM
PROBLEM TO BE SOLVED: To provide a Mn- and Nb-doped PZT based piezoelectric material film high in piezoelectric constant, low in dielectric constant, and superior in stability after a polarization process.SOLUTION: A Mn- and Nb-doped PZT based piezoelectric material film comprises a Mn- and Nb-doped complex metal oxide. In the film, metal atoms' ratio (Pb:Mn:Nb:Zr:Ti) satisfies (0.98-1.12):(0.002-0.056):(0.002-0.056):(0.40-0.60):(0.40-0.60). If the total of Mn and Nb metal atoms' ratios is one (1), the proportion of Mn is 0.20-0.80. If the total of Zr and Ti metal atoms' ratios is one (1), the proportion of Zr is 0.40-0.60. If the total of Mn, Nb, Zr and Ti metal atoms' ratios is one (1), the total proportion of Zr and Ti is 0.9300-0.9902.
【課題】圧電定数が高く、誘電率が低く、更に分極処理後の安定性に優れたＭｎ及びＮｂドープのＰＺＴ系圧電体膜を提供する。【解決手段】Ｍｎ及びＮｂドープの複合金属酸化物からなり、膜中の金属原子比（Ｐｂ：Ｍｎ：Ｎｂ：Ｚｒ：Ｔｉ）が（０．９８〜１．１２）：（０．００２〜０．０５６）：（０．００２〜０．０５６）：（０．４０〜０．６０）：（０．４０〜０．６０）を満たし、かつＭｎ及びＮｂの金属原子比の合計を１としたときのＭｎの割合が０．２０〜０．８０、Ｚｒ及びＴｉの金属原子比の合計を１としたときのＺｒの割合が０．４０〜０．６０、Ｍｎ、Ｎｂ、Ｚｒ及びＴｉの金属原子比の合計を１としたときのＺｒ及びＴｉの合計割合が０．９３００〜０．９９０２である。【選択図】図１
MANGANESE- AND NIOBIUM-DOPED PZT BASED PIEZOELECTRIC MATERIAL FILM
Ｍｎ及びＮｂドープのＰＺＴ系圧電体膜
DOI TOSHIHIRO (author) / SAKURAI HIDEAKI (author) / SOYAMA NOBUYUKI (author)
2015-11-02
Patent
Electronic Resource
Japanese
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