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A platform for research: civil engineering, architecture and urbanism
PELLICLE FRAME AND MANUFACTURING METHOD OF PELLICLE FRAME
PROBLEM TO BE SOLVED: To provide a pellicle frame having high durability against light exposure, with less wraparound of reflectance when exposed to light.SOLUTION: A pellicle frame formed into a predetermined frame shape is composed of a sintered body having a Young's modulus of 150 GPa and Vickers hardness of 800 or more, with lightness L* in the L*a*b* color system on the surface thereof being 60 or less. By using a sintered body, the pellicle frame has high durability, and wraparound of reflectance can be suppressed when exposed to light.SELECTED DRAWING: Figure 7
【課題】露光に対する耐久性が高く、露光を行なった際の反射光の回り込みの少ないペリクル枠を提供する。【解決手段】所定の枠形状に形成されたペリクル枠において、ヤング率１５０ＧＰａかつビッカース硬度８００以上の焼結体からなり、表面のＬ＊ａ＊ｂ＊表色系での明度Ｌ＊が、６０以下とする。このペリクル枠は、焼結体を用いているので耐久性が高く、かつ露光時の反射光の回り込みを抑制することができる。【選択図】図７
PELLICLE FRAME AND MANUFACTURING METHOD OF PELLICLE FRAME
PROBLEM TO BE SOLVED: To provide a pellicle frame having high durability against light exposure, with less wraparound of reflectance when exposed to light.SOLUTION: A pellicle frame formed into a predetermined frame shape is composed of a sintered body having a Young's modulus of 150 GPa and Vickers hardness of 800 or more, with lightness L* in the L*a*b* color system on the surface thereof being 60 or less. By using a sintered body, the pellicle frame has high durability, and wraparound of reflectance can be suppressed when exposed to light.SELECTED DRAWING: Figure 7
【課題】露光に対する耐久性が高く、露光を行なった際の反射光の回り込みの少ないペリクル枠を提供する。【解決手段】所定の枠形状に形成されたペリクル枠において、ヤング率１５０ＧＰａかつビッカース硬度８００以上の焼結体からなり、表面のＬ＊ａ＊ｂ＊表色系での明度Ｌ＊が、６０以下とする。このペリクル枠は、焼結体を用いているので耐久性が高く、かつ露光時の反射光の回り込みを抑制することができる。【選択図】図７
PELLICLE FRAME AND MANUFACTURING METHOD OF PELLICLE FRAME
ペリクル枠およびペリクル枠の製造方法
KIMURA YUKIHIRO (author) / KOMATSU TAKAHISA (author)
2016-07-07
Patent
Electronic Resource
Japanese
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