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    FERROELECTRIC FILM AND MANUFACTURING METHOD OF SAME

    New search for: SAKURAI HIDEAKI
    New search for: FUJII JUN
    New search for: SOYAMA NOBUYUKI

    PROBLEM TO BE SOLVED: To provide a ferroelectric film excellent in lifetime reliability and manufacturing method of the same.SOLUTION: The ferroelectric film is composed of a plurality of calcined films. They are composed of a metal oxide of a perovskite structure containing Pb, Zr, and Ti. The total content of Li, Na, K is less than or equal to 3 ppm by mass. The total content of Li, Na, K on one surface of each of the calcined films constituting the plurality of calcined films is greater than or equal to five times the total content of Li, Na, K on the other surface.SELECTED DRAWING: Figure 2

    【課題】寿命信頼性に優れた強誘電体膜とその製造方法を提供する。【解決手段】複数の焼成膜からなる強誘電体膜であって、Ｐｂ、Ｚｒ及びＴｉを含有するペロブスカイト構造の金属酸化物からなり、Ｌｉ、Ｎａ及びＫの合計含有量が３質量ｐｐｍ以下であり、前記複数の焼成膜を構成する各焼成膜の一方の面におけるＬｉ、Ｎａ及びＫの合計含有量が、他方の面におけるＬｉ、Ｎａ及びＫの合計含有量の５倍以上である。【選択図】図２

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    FERROELECTRIC FILM AND MANUFACTURING METHOD OF SAME

    New search for: SAKURAI HIDEAKI
    New search for: FUJII JUN
    New search for: SOYAMA NOBUYUKI

    PROBLEM TO BE SOLVED: To provide a ferroelectric film excellent in lifetime reliability and manufacturing method of the same.SOLUTION: The ferroelectric film is composed of a plurality of calcined films. They are composed of a metal oxide of a perovskite structure containing Pb, Zr, and Ti. The total content of Li, Na, K is less than or equal to 3 ppm by mass. The total content of Li, Na, K on one surface of each of the calcined films constituting the plurality of calcined films is greater than or equal to five times the total content of Li, Na, K on the other surface.SELECTED DRAWING: Figure 2

    【課題】寿命信頼性に優れた強誘電体膜とその製造方法を提供する。【解決手段】複数の焼成膜からなる強誘電体膜であって、Ｐｂ、Ｚｒ及びＴｉを含有するペロブスカイト構造の金属酸化物からなり、Ｌｉ、Ｎａ及びＫの合計含有量が３質量ｐｐｍ以下であり、前記複数の焼成膜を構成する各焼成膜の一方の面におけるＬｉ、Ｎａ及びＫの合計含有量が、他方の面におけるＬｉ、Ｎａ及びＫの合計含有量の５倍以上である。【選択図】図２

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    FERROELECTRIC FILM AND MANUFACTURING METHOD OF SAME

    New search for: SAKURAI HIDEAKI
    New search for: FUJII JUN
    New search for: SOYAMA NOBUYUKI

    PROBLEM TO BE SOLVED: To provide a ferroelectric film excellent in lifetime reliability and manufacturing method of the same.SOLUTION: The ferroelectric film is composed of a plurality of calcined films. They are composed of a metal oxide of a perovskite structure containing Pb, Zr, and Ti. The total content of Li, Na, K is less than or equal to 3 ppm by mass. The total content of Li, Na, K on one surface of each of the calcined films constituting the plurality of calcined films is greater than or equal to five times the total content of Li, Na, K on the other surface.SELECTED DRAWING: Figure 2

    【課題】寿命信頼性に優れた強誘電体膜とその製造方法を提供する。【解決手段】複数の焼成膜からなる強誘電体膜であって、Ｐｂ、Ｚｒ及びＴｉを含有するペロブスカイト構造の金属酸化物からなり、Ｌｉ、Ｎａ及びＫの合計含有量が３質量ｐｐｍ以下であり、前記複数の焼成膜を構成する各焼成膜の一方の面におけるＬｉ、Ｎａ及びＫの合計含有量が、他方の面におけるＬｉ、Ｎａ及びＫの合計含有量の５倍以上である。【選択図】図２

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    Title:

    FERROELECTRIC FILM AND MANUFACTURING METHOD OF SAME

    Additional title:

    強誘電体膜及びその製造方法

    Contributors:

    SAKURAI HIDEAKI (author) / FUJII JUN (author) / SOYAMA NOBUYUKI (author)

    Publication date:

    2016-10-20

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    Japanese

    Classification:

    IPC:  H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / C01G Verbindungen der von den Unterklassen C01D oder C01F nicht umfassten Metalle , COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F / C04B Kalk , LIME

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