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Ferroelectric thin film, method of manufacturing same and method of manufacturing piezoelectric element
In order to obtain a ferroelectric thin film that is formed to have a predetermined thickness on a substrate, that have satisfactory crystallization and that achieves a high piezoelectric property, a method of manufacturing such a ferroelectric thin film and a method of manufacturing a piezoelectric element having such a ferroelectric thin film, when a dielectric material of a perovskite structure is formed into a film on the substrate, a predetermined amount of additive is mixed with PZT, and the concentration of the additive mixed is varied in the thickness direction of the thin film.
Ferroelectric thin film, method of manufacturing same and method of manufacturing piezoelectric element
In order to obtain a ferroelectric thin film that is formed to have a predetermined thickness on a substrate, that have satisfactory crystallization and that achieves a high piezoelectric property, a method of manufacturing such a ferroelectric thin film and a method of manufacturing a piezoelectric element having such a ferroelectric thin film, when a dielectric material of a perovskite structure is formed into a film on the substrate, a predetermined amount of additive is mixed with PZT, and the concentration of the additive mixed is varied in the thickness direction of the thin film.
Ferroelectric thin film, method of manufacturing same and method of manufacturing piezoelectric element
MAWATARI KENJI (author)
2017-07-11
Patent
Electronic Resource
English
IPC:
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
B41J
TYPEWRITERS
,
Schreibmaschinen
/
C04B
Kalk
,
LIME
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
G01J
Messen der Intensität, der Geschwindigkeit, der spektralen Zusammensetzung, der Polarisation, der Phase oder der Pulscharakteristik von infrarotem, sichtbarem oder ultraviolettem Licht
,
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
/
H03H
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
,
Scheinwiderstandsnetzwerke, z.B. Resonanzkreise
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