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FERROELECTRIC FILM MANUFACTURING METHOD
To manufacture a ferroelectric film that does not contain lead and has excellent crystallinity and electrical characteristics.SOLUTION: A ferroelectric film manufacturing method includes a coating step of forming a coating film by coating a liquid composition containing at least Bi, K, and Ti on a substrate, a calcining step of calcining the coating film to form a calcined film, and a firing step of firing the calcined film. Between the calcinating step and the firing step, a decarbonization treatment process for removing carbon from the calcined film is included, and the decarbonization treatment is treatment of heating the calcined film at a temperature of 475°C or higher and 575°C or lower in a reduced pressure atmosphere.SELECTED DRAWING: None
【課題】鉛を含まず、結晶性と電気特性に優れた強誘電体膜を製造する。【解決手段】Ｂｉ、Ｋ及びＴｉを少なくとも含む液組成物を基板上に塗布して塗膜を形成する塗布工程と、この塗膜を仮焼し仮焼膜を形成する仮焼工程と、この仮焼膜を焼成する焼成工程を含む強誘電体膜の製造方法である。仮焼工程と焼成工程の間に仮焼膜から炭素を除去する脱炭素処理工程を含み、脱炭素処理が仮焼膜を減圧雰囲気下、４７５℃以上５７５℃以下の温度で加熱する処理である。【選択図】なし
FERROELECTRIC FILM MANUFACTURING METHOD
To manufacture a ferroelectric film that does not contain lead and has excellent crystallinity and electrical characteristics.SOLUTION: A ferroelectric film manufacturing method includes a coating step of forming a coating film by coating a liquid composition containing at least Bi, K, and Ti on a substrate, a calcining step of calcining the coating film to form a calcined film, and a firing step of firing the calcined film. Between the calcinating step and the firing step, a decarbonization treatment process for removing carbon from the calcined film is included, and the decarbonization treatment is treatment of heating the calcined film at a temperature of 475°C or higher and 575°C or lower in a reduced pressure atmosphere.SELECTED DRAWING: None
【課題】鉛を含まず、結晶性と電気特性に優れた強誘電体膜を製造する。【解決手段】Ｂｉ、Ｋ及びＴｉを少なくとも含む液組成物を基板上に塗布して塗膜を形成する塗布工程と、この塗膜を仮焼し仮焼膜を形成する仮焼工程と、この仮焼膜を焼成する焼成工程を含む強誘電体膜の製造方法である。仮焼工程と焼成工程の間に仮焼膜から炭素を除去する脱炭素処理工程を含み、脱炭素処理が仮焼膜を減圧雰囲気下、４７５℃以上５７５℃以下の温度で加熱する処理である。【選択図】なし
FERROELECTRIC FILM MANUFACTURING METHOD
強誘電体膜の製造方法
DOI TOSHIHIRO (author) / SOYAMA NOBUYUKI (author)
2020-08-31
Patent
Electronic Resource
Japanese
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