A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR AND ELECTRONIC APPARATUS
PROBLEM TO BE SOLVED: To provide a lead-free piezoelectric element, having a good piezoelectric constant and a small dielectric loss tangent, at room air temperature (25°C).SOLUTION: In a piezoelectric element provided with a substrate, a first electrode, a piezoelectric film, and a second electrode, the piezoelectric film contains titanate zirconate barium, manganese, and trivalent bismuth. The mole ratio x of zirconium to the sum of zirconium and titanium is 0.02≤x≤0.13, the content of manganese to 1 mole of titanate zirconate barium is 0.002-0.015 mole, and the content of bismuth to 1 mole of the metal oxide is 0.00042-0.00850 mole.SELECTED DRAWING: Figure 1
【課題】室温（２５℃）において、良好な圧電定数と小さな誘電正接を有する、鉛を含有しない圧電素子を提供する。【解決手段】基板、第一の電極、圧電膜、および第二の電極が設けられた圧電素子であって、前記圧電膜はチタン酸ジルコン酸バリウムと、マンガンと、３価のビスマスとを含有し、ジルコニウムとチタンの和に対するジルコニウムのモル比であるｘの値が、０．０２≦ｘ≦０．１３であり、前記マンガンの含有量は前記チタン酸ジルコン酸バリウム１モルに対して０．００２モル以上０．０１５モル以下、前記ビスマスの含有量が前記金属酸化物１モルに対して０．０００４２モル以上０．００８５０モル以下である圧電素子。【選択図】 図１
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR AND ELECTRONIC APPARATUS
PROBLEM TO BE SOLVED: To provide a lead-free piezoelectric element, having a good piezoelectric constant and a small dielectric loss tangent, at room air temperature (25°C).SOLUTION: In a piezoelectric element provided with a substrate, a first electrode, a piezoelectric film, and a second electrode, the piezoelectric film contains titanate zirconate barium, manganese, and trivalent bismuth. The mole ratio x of zirconium to the sum of zirconium and titanium is 0.02≤x≤0.13, the content of manganese to 1 mole of titanate zirconate barium is 0.002-0.015 mole, and the content of bismuth to 1 mole of the metal oxide is 0.00042-0.00850 mole.SELECTED DRAWING: Figure 1
【課題】室温（２５℃）において、良好な圧電定数と小さな誘電正接を有する、鉛を含有しない圧電素子を提供する。【解決手段】基板、第一の電極、圧電膜、および第二の電極が設けられた圧電素子であって、前記圧電膜はチタン酸ジルコン酸バリウムと、マンガンと、３価のビスマスとを含有し、ジルコニウムとチタンの和に対するジルコニウムのモル比であるｘの値が、０．０２≦ｘ≦０．１３であり、前記マンガンの含有量は前記チタン酸ジルコン酸バリウム１モルに対して０．００２モル以上０．０１５モル以下、前記ビスマスの含有量が前記金属酸化物１モルに対して０．０００４２モル以上０．００８５０モル以下である圧電素子。【選択図】 図１
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR AND ELECTRONIC APPARATUS
圧電素子、圧電アクチュエータおよび電子機器
MATSUDA KATAYOSHI (author) / KUBOTA JUN (author) / MIURA KAORU (author)
2017-06-15
Patent
Electronic Resource
Japanese
IPC:
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
B41J
TYPEWRITERS
,
Schreibmaschinen
/
B81B
Mikrostrukturbauelemente oder -systeme, z.B. mikromechanische Bauelemente
,
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
/
C04B
Kalk
,
LIME
/
G01C
Messen von Entfernungen, Höhen, Neigungen oder Richtungen
,
MEASURING DISTANCES, LEVELS OR BEARINGS
/
G02B
Optische Elemente, Systeme oder Geräte
,
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
/
G03B
APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM
,
Geräte oder Anordnungen zum Aufnehmen, Projizieren oder Betrachten von Fotografien
/
H02N
Elektrische Maschinen, soweit nicht anderweitig vorgesehen
,
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
/
H03H
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
,
Scheinwiderstandsnetzwerke, z.B. Resonanzkreise
/
H04R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS
,
Lautsprecher, Mikrofone, Schallplatten-Tonabnehmer oder ähnliche akustische, elektromechanische Wandler
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