A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR AND ELECTRONIC APPARATUS USING THEM
PROBLEM TO BE SOLVED: To provide a thin-film piezoelectric element having a high piezoelectric constant and a small dielectric loss stably in a temperature range of -30°C through 50°C.SOLUTION: In a piezoelectric element provided with a substrate, a first electrode, a piezoelectric film, and a second electrode, the piezoelectric film is an oxide containing Ba, Bi, Ti, Zr, Fe and Mn, the y value indicating the molar ratio of Bi to the sum of Ba and Bi in the piezoelectric film is 0.001≤y≤0.015, the x value indicating the molar ratio of Zr to the sum of Ti, Zr and Fe is 0.010≤x≤0.060, the z value indicating the molar ratio of Fe to the sum of Ti, Zr and Fe is 0.001≤z≤0.015, the m value indicating the molar ratio of Mn to the sum of Ti, Zr and Fe is 0.0020≤m≤0.0150, and the relation of the y and z is 0.90≤y/z≤1.10.SELECTED DRAWING: Figure 1
【課題】−３０℃〜５０℃の温度範囲内において安定して高い圧電定数と小さな誘電損失を有する薄膜型の圧電素子を提供する。【解決手段】基板、第一の電極、圧電膜、第二の電極が設けられた圧電素子であって、前記圧電膜はＢａ、Ｂｉ、Ｔｉ、Ｚｒ、ＦｅおよびＭｎを含む酸化物であり、前記圧電膜におけるＢａおよびＢｉの和に対するＢｉのモル比を示すｙ値が０．００１≦ｙ≦０．０１５であり、Ｔｉ、ＺｒおよびＦｅの和に対するＺｒのモル比を示すｘ値が０．０１０≦ｘ≦０．０６０であり、前記Ｔｉ、ＺｒおよびＦｅの和に対するＦｅのモル比を示すｚ値が０．００１≦ｚ≦０．０１５であり、前記Ｔｉ、ＺｒおよびＦｅの和に対するＭｎのモル比を示すｍ値が０．００２０≦ｍ≦０．０１５０であり、かつ、ｙとｚの関係が０．９０≦ｙ／ｚ≦１．１０であることを特徴とする圧電素子。【選択図】 図１
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR AND ELECTRONIC APPARATUS USING THEM
PROBLEM TO BE SOLVED: To provide a thin-film piezoelectric element having a high piezoelectric constant and a small dielectric loss stably in a temperature range of -30°C through 50°C.SOLUTION: In a piezoelectric element provided with a substrate, a first electrode, a piezoelectric film, and a second electrode, the piezoelectric film is an oxide containing Ba, Bi, Ti, Zr, Fe and Mn, the y value indicating the molar ratio of Bi to the sum of Ba and Bi in the piezoelectric film is 0.001≤y≤0.015, the x value indicating the molar ratio of Zr to the sum of Ti, Zr and Fe is 0.010≤x≤0.060, the z value indicating the molar ratio of Fe to the sum of Ti, Zr and Fe is 0.001≤z≤0.015, the m value indicating the molar ratio of Mn to the sum of Ti, Zr and Fe is 0.0020≤m≤0.0150, and the relation of the y and z is 0.90≤y/z≤1.10.SELECTED DRAWING: Figure 1
【課題】−３０℃〜５０℃の温度範囲内において安定して高い圧電定数と小さな誘電損失を有する薄膜型の圧電素子を提供する。【解決手段】基板、第一の電極、圧電膜、第二の電極が設けられた圧電素子であって、前記圧電膜はＢａ、Ｂｉ、Ｔｉ、Ｚｒ、ＦｅおよびＭｎを含む酸化物であり、前記圧電膜におけるＢａおよびＢｉの和に対するＢｉのモル比を示すｙ値が０．００１≦ｙ≦０．０１５であり、Ｔｉ、ＺｒおよびＦｅの和に対するＺｒのモル比を示すｘ値が０．０１０≦ｘ≦０．０６０であり、前記Ｔｉ、ＺｒおよびＦｅの和に対するＦｅのモル比を示すｚ値が０．００１≦ｚ≦０．０１５であり、前記Ｔｉ、ＺｒおよびＦｅの和に対するＭｎのモル比を示すｍ値が０．００２０≦ｍ≦０．０１５０であり、かつ、ｙとｚの関係が０．９０≦ｙ／ｚ≦１．１０であることを特徴とする圧電素子。【選択図】 図１
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR AND ELECTRONIC APPARATUS USING THEM
圧電素子、圧電アクチュエータおよびそれらを用いた電子機器
KUBOTA JUN (author) / MATSUDA KATAYOSHI (author) / MIURA KAORU (author)
2017-06-22
Patent
Electronic Resource
Japanese
IPC:
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
A61B
DIAGNOSIS
,
Diagnostik
/
B41J
TYPEWRITERS
,
Schreibmaschinen
/
B81B
Mikrostrukturbauelemente oder -systeme, z.B. mikromechanische Bauelemente
,
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
/
C04B
Kalk
,
LIME
/
G02B
Optische Elemente, Systeme oder Geräte
,
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
/
G03B
APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM
,
Geräte oder Anordnungen zum Aufnehmen, Projizieren oder Betrachten von Fotografien
/
H02N
Elektrische Maschinen, soweit nicht anderweitig vorgesehen
,
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
/
H03H
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
,
Scheinwiderstandsnetzwerke, z.B. Resonanzkreise
/
H04R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS
,
Lautsprecher, Mikrofone, Schallplatten-Tonabnehmer oder ähnliche akustische, elektromechanische Wandler
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