A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
MULLITE-CONTAINING SINTERED MATERIAL, MANUFACTURING METHOD THEREFOR, AND COMPOSITE SUBSTRATE
PROBLEM TO BE SOLVED: To provide a mullite-containing sintered material in which the coefficient of thermal expansion is made lower and the rigidity is made higher as compared to that of mullite alone as well as having an enhanced flatness of the polished surface.SOLUTION: The mullite-containing sintered material of the present invention contains, in addition to mullite, at least one kind selected from the group consisting of silicon nitride, silicon oxynitride and sialon. Said mullite-containing sintered material preferably has a 40 to 400°C thermal expansion coefficient of less than 4.3 ppm/°C, an open porosity of 0.5% or less, and an average crystal grain size of 1.5 μm or less.SELECTED DRAWING: None
【課題】ムライトを含有する焼結体において、ムライト単独に比べて熱膨張係数を低く剛性を高くすると共に、研磨面の平坦性を高くする。【解決手段】本発明のムライト含有焼結体は、ムライトのほかに、窒化珪素、酸窒化珪素及びサイアロンからなる群より選ばれた少なくとも１種を含有する。このムライト含有焼結体は、４０〜４００℃の熱膨張係数が４．３ｐｐｍ／℃未満であり、開気孔率が０．５％以下であり、平均結晶粒径が１．５μｍ以下であることが好ましい。【選択図】なし
MULLITE-CONTAINING SINTERED MATERIAL, MANUFACTURING METHOD THEREFOR, AND COMPOSITE SUBSTRATE
PROBLEM TO BE SOLVED: To provide a mullite-containing sintered material in which the coefficient of thermal expansion is made lower and the rigidity is made higher as compared to that of mullite alone as well as having an enhanced flatness of the polished surface.SOLUTION: The mullite-containing sintered material of the present invention contains, in addition to mullite, at least one kind selected from the group consisting of silicon nitride, silicon oxynitride and sialon. Said mullite-containing sintered material preferably has a 40 to 400°C thermal expansion coefficient of less than 4.3 ppm/°C, an open porosity of 0.5% or less, and an average crystal grain size of 1.5 μm or less.SELECTED DRAWING: None
【課題】ムライトを含有する焼結体において、ムライト単独に比べて熱膨張係数を低く剛性を高くすると共に、研磨面の平坦性を高くする。【解決手段】本発明のムライト含有焼結体は、ムライトのほかに、窒化珪素、酸窒化珪素及びサイアロンからなる群より選ばれた少なくとも１種を含有する。このムライト含有焼結体は、４０〜４００℃の熱膨張係数が４．３ｐｐｍ／℃未満であり、開気孔率が０．５％以下であり、平均結晶粒径が１．５μｍ以下であることが好ましい。【選択図】なし
MULLITE-CONTAINING SINTERED MATERIAL, MANUFACTURING METHOD THEREFOR, AND COMPOSITE SUBSTRATE
ムライト含有焼結体、その製法及び複合基板
ISODA YOSHINORI (author) / SUZUKI YOSHIO (author) / INOUE KATSUHIRO (author) / KATSUTA YUJI (author)
2017-09-28
Patent
Electronic Resource
Japanese
IPC:
C04B
Kalk
,
LIME
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