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MULLITE-CONTAINING SINTERED BODY METHOD FOR MANUFACTURING THE SAME AND COMPOSITE SUBSTRATE
본 발명의 멀라이트 함유 소결체는, 멀라이트 이외에 질화규소, 산질화규소 및 사이알론으로 이루어진 군에서 선택된 적어도 1종을 함유한다. 이 멀라이트 함유 소결체는, 40℃∼400℃의 열팽창계수가 4.3 ppm/℃ 미만이고, 개기공률이 0.5% 이하이며, 평균 결정 입경이 1.5 ㎛ 이하인 것이 바람직하다.
A mullite-containing sintered body according to the present invention contains mullite and at least one selected from the group consisting of silicon nitride, silicon oxynitride, and sialon. It is preferable that the mullite-containing sintered body have a thermal expansion coefficient of less than 4.3 ppm/° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1.5 μm or less.
MULLITE-CONTAINING SINTERED BODY METHOD FOR MANUFACTURING THE SAME AND COMPOSITE SUBSTRATE
본 발명의 멀라이트 함유 소결체는, 멀라이트 이외에 질화규소, 산질화규소 및 사이알론으로 이루어진 군에서 선택된 적어도 1종을 함유한다. 이 멀라이트 함유 소결체는, 40℃∼400℃의 열팽창계수가 4.3 ppm/℃ 미만이고, 개기공률이 0.5% 이하이며, 평균 결정 입경이 1.5 ㎛ 이하인 것이 바람직하다.
A mullite-containing sintered body according to the present invention contains mullite and at least one selected from the group consisting of silicon nitride, silicon oxynitride, and sialon. It is preferable that the mullite-containing sintered body have a thermal expansion coefficient of less than 4.3 ppm/° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1.5 μm or less.
MULLITE-CONTAINING SINTERED BODY METHOD FOR MANUFACTURING THE SAME AND COMPOSITE SUBSTRATE
멀라이트 함유 소결체, 그 제법 및 복합 기판
ISODA YOSHINORI (author) / SUZUKI YOSHIO (author) / INOUE KATSUHIRO (author) / KATSUDA YUJI (author)
2017-10-11
Patent
Electronic Resource
Korean
IPC:
C04B
Kalk
,
LIME
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