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METHOD FOR MANUFACTURING CERAMIC/ALUMINUM-SILICON CARBIDE COMPOSITE MATERIAL JOINED BODY, AND METHOD FOR MANUFACTURING SUBSTRATE FOR HEAT SINK-EQUIPPED POWER MODULE
PROBLEM TO BE SOLVED: To provide a method for manufacturing a ceramic/Al-SiC composite material joined body, by which a ceramic member and an Al-SiC composite material can be joined together by heating at a relatively low temperature with a high strength without eluting an aluminum material in the Al-SiC composite material.SOLUTION: A method for manufacturing a ceramic/Al-SiC composite material joined body, comprises the steps of: forming a magnesium layer of 0.1 to 10 μm in thickness on a surface of at least one of a ceramic member and an Al-SiC composite material, the Al-SiC composite material having an aluminum material made of an Al-Si alloy of 0.1 atom% in silicon content; laminating the ceramic member and the Al-SiC composite material through the magnesium layer to obtain a laminate; and heating the laminate in a temperature range of 550 to 575°C, thereby joining the ceramic member with the Al-SiC composite material.SELECTED DRAWING: Figure 1
【課題】セラミックス部材とＡｌ−ＳｉＣ複合材料とを、比較的低温での加熱によって、Ａｌ−ＳｉＣ複合材料中のアルミニウム材を溶出させずに、かつ高強度で接合することができるセラミックス／Ａｌ−ＳｉＣ複合材料接合体の製造方法を提供する。【解決手段】Ａｌ−ＳｉＣ複合材料が、ケイ素含有量が０．１原子％以上であるＡｌ−Ｓｉ合金からなるアルミニウム材を有し、セラミックス部材およびＡｌ−ＳｉＣ複合材料のうちの少なくとも一方の表面に、厚さが０．１μｍ以上１０μｍ以下のマグネシウム層を形成する工程と、前記セラミックス部材と前記Ａｌ−ＳｉＣ複合材料とを、前記マグネシウム層を介して積層して、積層体を得る工程と、前記積層体を５５０℃以上５７５℃以下の温度範囲で加熱することによって、前記セラミックス部材と前記Ａｌ−ＳｉＣ複合材料とを接合する工程と、を備えているセラミックス／Ａｌ−ＳｉＣ複合材料接合体の製造方法。【選択図】図１
METHOD FOR MANUFACTURING CERAMIC/ALUMINUM-SILICON CARBIDE COMPOSITE MATERIAL JOINED BODY, AND METHOD FOR MANUFACTURING SUBSTRATE FOR HEAT SINK-EQUIPPED POWER MODULE
PROBLEM TO BE SOLVED: To provide a method for manufacturing a ceramic/Al-SiC composite material joined body, by which a ceramic member and an Al-SiC composite material can be joined together by heating at a relatively low temperature with a high strength without eluting an aluminum material in the Al-SiC composite material.SOLUTION: A method for manufacturing a ceramic/Al-SiC composite material joined body, comprises the steps of: forming a magnesium layer of 0.1 to 10 μm in thickness on a surface of at least one of a ceramic member and an Al-SiC composite material, the Al-SiC composite material having an aluminum material made of an Al-Si alloy of 0.1 atom% in silicon content; laminating the ceramic member and the Al-SiC composite material through the magnesium layer to obtain a laminate; and heating the laminate in a temperature range of 550 to 575°C, thereby joining the ceramic member with the Al-SiC composite material.SELECTED DRAWING: Figure 1
【課題】セラミックス部材とＡｌ−ＳｉＣ複合材料とを、比較的低温での加熱によって、Ａｌ−ＳｉＣ複合材料中のアルミニウム材を溶出させずに、かつ高強度で接合することができるセラミックス／Ａｌ−ＳｉＣ複合材料接合体の製造方法を提供する。【解決手段】Ａｌ−ＳｉＣ複合材料が、ケイ素含有量が０．１原子％以上であるＡｌ−Ｓｉ合金からなるアルミニウム材を有し、セラミックス部材およびＡｌ−ＳｉＣ複合材料のうちの少なくとも一方の表面に、厚さが０．１μｍ以上１０μｍ以下のマグネシウム層を形成する工程と、前記セラミックス部材と前記Ａｌ−ＳｉＣ複合材料とを、前記マグネシウム層を介して積層して、積層体を得る工程と、前記積層体を５５０℃以上５７５℃以下の温度範囲で加熱することによって、前記セラミックス部材と前記Ａｌ−ＳｉＣ複合材料とを接合する工程と、を備えているセラミックス／Ａｌ−ＳｉＣ複合材料接合体の製造方法。【選択図】図１
METHOD FOR MANUFACTURING CERAMIC/ALUMINUM-SILICON CARBIDE COMPOSITE MATERIAL JOINED BODY, AND METHOD FOR MANUFACTURING SUBSTRATE FOR HEAT SINK-EQUIPPED POWER MODULE
セラミックス／Ａｌ−ＳｉＣ複合材料接合体の製造方法、及びヒートシンク付パワーモジュール用基板の製造方法
YUMOTO RYOHEI (author) / OHIRAKI TOMOYA (author) / OI SOTARO (author)
2018-03-01
Patent
Electronic Resource
Japanese
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