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PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ELEMENT APPLICATION DEVICE, AND MANUFACTURING METHOD OF PIEZOELECTRIC ELEMENT
PROBLEM TO BE SOLVED: To provide: a piezoelectric element by use of a KNN(potassium sodium niobate) based piezoelectric material of a thin film improved in insulating property; a piezoelectric element application device; and a manufacturing method of the piezoelectric element.SOLUTION: A piezoelectric element 300 comprises: a first electrode 60; a piezoelectric material layer 70 formed on the first electrode 60 by a solution method and including a composite oxide of a perovskite type structure including potassium, sodium and niobium; and a second electrode 80 provided on the piezoelectric material layer 70. The composite oxide further includes lithium and manganese; a lithium content is 3-5 mol% to a total metal mol number of A sites, and a manganese content is 5 mol% or less to a total metal mol number of B sites. According to measurement by SIMS, the maximum of measured intensities (CPS) of lithium in a film thickness direction of the piezoelectric material layer is lower than 2.65 times the minimum value.SELECTED DRAWING: Figure 4
【課題】絶縁性の向上した薄膜のＫＮＮ（ニオブ酸カリウムナトリウム）系圧電体を用いた圧電素子、圧電素子応用デバイス及び圧電素子の製造方法を提供する。【解決手段】第１電極６０と、第１電極６０上に溶液法によって形成され、カリウムと、ナトリウムと、ニオブと、を含むペロブスカイト型構造の複合酸化物からなる圧電体層７０と、圧電体層７０上に設けられた第２電極８０と、を備えた圧電素子３００であって、複合酸化物は、さらに、リチウム及びマンガンを含み、リチウムの含有量がＡサイトの総金属モル数中、３ｍｏｌ％〜５ｍｏｌ％、マンガンの含有量がＢサイトの総金属モル数中５ｍｏｌ％以下であり、ＳＩＭＳ測定における圧電体層の膜厚方向でのリチウムの測定強度（ＣＰＳ）の最高値が最低値の２．６５倍より低い。【選択図】図４
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ELEMENT APPLICATION DEVICE, AND MANUFACTURING METHOD OF PIEZOELECTRIC ELEMENT
PROBLEM TO BE SOLVED: To provide: a piezoelectric element by use of a KNN(potassium sodium niobate) based piezoelectric material of a thin film improved in insulating property; a piezoelectric element application device; and a manufacturing method of the piezoelectric element.SOLUTION: A piezoelectric element 300 comprises: a first electrode 60; a piezoelectric material layer 70 formed on the first electrode 60 by a solution method and including a composite oxide of a perovskite type structure including potassium, sodium and niobium; and a second electrode 80 provided on the piezoelectric material layer 70. The composite oxide further includes lithium and manganese; a lithium content is 3-5 mol% to a total metal mol number of A sites, and a manganese content is 5 mol% or less to a total metal mol number of B sites. According to measurement by SIMS, the maximum of measured intensities (CPS) of lithium in a film thickness direction of the piezoelectric material layer is lower than 2.65 times the minimum value.SELECTED DRAWING: Figure 4
【課題】絶縁性の向上した薄膜のＫＮＮ（ニオブ酸カリウムナトリウム）系圧電体を用いた圧電素子、圧電素子応用デバイス及び圧電素子の製造方法を提供する。【解決手段】第１電極６０と、第１電極６０上に溶液法によって形成され、カリウムと、ナトリウムと、ニオブと、を含むペロブスカイト型構造の複合酸化物からなる圧電体層７０と、圧電体層７０上に設けられた第２電極８０と、を備えた圧電素子３００であって、複合酸化物は、さらに、リチウム及びマンガンを含み、リチウムの含有量がＡサイトの総金属モル数中、３ｍｏｌ％〜５ｍｏｌ％、マンガンの含有量がＢサイトの総金属モル数中５ｍｏｌ％以下であり、ＳＩＭＳ測定における圧電体層の膜厚方向でのリチウムの測定強度（ＣＰＳ）の最高値が最低値の２．６５倍より低い。【選択図】図４
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ELEMENT APPLICATION DEVICE, AND MANUFACTURING METHOD OF PIEZOELECTRIC ELEMENT
圧電素子、圧電素子応用デバイス及び圧電素子の製造方法
KITADA KAZUYA (author)
2018-05-24
Patent
Electronic Resource
Japanese
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