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PIEZOELECTRIC ELEMENT, AND PIEZOELECTRIC ELEMENT APPLICATION DEVICE
To provide a piezoelectric element that can improve insulating properties inside a piezoelectric layer.SOLUTION: A piezoelectric element of the present invention includes: a substrate; a first electrode formed on the substrate; a piezoelectric layer formed on the first electrode; and a second electrode formed on the piezoelectric layer, and the piezoelectric layer contains potassium, sodium, niobium, oxygen, and carbon. In secondary ion mass spectrometry inside the piezoelectric layer, the ratio of the maximum intensity of carbon to the maximum intensity of oxygen is 3.1×10-3 or more and 9.1×10-3 or less.SELECTED DRAWING: Figure 5
【課題】圧電体層内部の絶縁性を高めることができる圧電素子を提供する。【解決手段】本発明の圧電素子は、基板と、基板上に形成された第１電極と、第１電極上に形成された圧電体層と、圧電体層上に形成された第２電極と、を備えた圧電素子であって、圧電体層は、カリウムとナトリウムとニオブと酸素と炭素とを含み、圧電体層内の２次イオン質量分析において、酸素の最大強度に対する、炭素の最大強度の比率が、３．１×１０－３以上、９．１×１０－３以下である。【選択図】図５
PIEZOELECTRIC ELEMENT, AND PIEZOELECTRIC ELEMENT APPLICATION DEVICE
To provide a piezoelectric element that can improve insulating properties inside a piezoelectric layer.SOLUTION: A piezoelectric element of the present invention includes: a substrate; a first electrode formed on the substrate; a piezoelectric layer formed on the first electrode; and a second electrode formed on the piezoelectric layer, and the piezoelectric layer contains potassium, sodium, niobium, oxygen, and carbon. In secondary ion mass spectrometry inside the piezoelectric layer, the ratio of the maximum intensity of carbon to the maximum intensity of oxygen is 3.1×10-3 or more and 9.1×10-3 or less.SELECTED DRAWING: Figure 5
【課題】圧電体層内部の絶縁性を高めることができる圧電素子を提供する。【解決手段】本発明の圧電素子は、基板と、基板上に形成された第１電極と、第１電極上に形成された圧電体層と、圧電体層上に形成された第２電極と、を備えた圧電素子であって、圧電体層は、カリウムとナトリウムとニオブと酸素と炭素とを含み、圧電体層内の２次イオン質量分析において、酸素の最大強度に対する、炭素の最大強度の比率が、３．１×１０－３以上、９．１×１０－３以下である。【選択図】図５
PIEZOELECTRIC ELEMENT, AND PIEZOELECTRIC ELEMENT APPLICATION DEVICE
圧電素子、および圧電素子応用デバイス
KITADA KAZUYA (author) / OHASHI KOJI (author) / HAMADA YASUAKI (author) / YANO YOSHIKI (author)
2023-10-16
Patent
Electronic Resource
Japanese
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