A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
METHOD OF MANUFACTURING CERAMIC HEATER
PROBLEM TO BE SOLVED: To provide a ceramic heater in which the ceramic heater can be suitably manufactured even when thickness of an electrode, such as an RF electrode is large.SOLUTION: In a method of manufacturing a ceramic heater, an electrode pattern 61 is formed on the surface of a first laminate 59 formed by laminating a ceramic green sheet 51. A mold 65 is arranged so as to surround the outer periphery of the first laminate 59, and ceramic slurry 63 is poured into the mold 65 to cover the surface of an electrode pattern 61 or the like. Thereafter, by making the ceramic heater by firing the dried second laminate, the ceramic slurry 63 can be filled around an RF electrode having large thickness without gaps and damage such as a crack becomes less likely to occur.SELECTED DRAWING: Figure 4
【課題】ＲＦ電極等の電極の厚みが大きな場合でも、好適にセラミックヒータを製造することができるセラミックヒータの製造方法を提供すること。【解決手段】セラミックヒータの製造方法では、セラミックグリーンシート５１を積層した第１積層体５９の表面に電極パターン６１を形成する。その第１積層体５９の外周を囲むように型枠６５を配置し、その型枠６５内にセラミックスラリー６３を流し込んで電極パターン６１等の表面を覆う。その後、乾燥した第２積層体を焼成してセラミックヒータを作製することで、厚みの大きなＲＦ電極の周囲に隙間なくセラミックスラリー６３を充填でき、焼成の際にクラック等の破損が生じにくくなる。【選択図】図４
METHOD OF MANUFACTURING CERAMIC HEATER
PROBLEM TO BE SOLVED: To provide a ceramic heater in which the ceramic heater can be suitably manufactured even when thickness of an electrode, such as an RF electrode is large.SOLUTION: In a method of manufacturing a ceramic heater, an electrode pattern 61 is formed on the surface of a first laminate 59 formed by laminating a ceramic green sheet 51. A mold 65 is arranged so as to surround the outer periphery of the first laminate 59, and ceramic slurry 63 is poured into the mold 65 to cover the surface of an electrode pattern 61 or the like. Thereafter, by making the ceramic heater by firing the dried second laminate, the ceramic slurry 63 can be filled around an RF electrode having large thickness without gaps and damage such as a crack becomes less likely to occur.SELECTED DRAWING: Figure 4
【課題】ＲＦ電極等の電極の厚みが大きな場合でも、好適にセラミックヒータを製造することができるセラミックヒータの製造方法を提供すること。【解決手段】セラミックヒータの製造方法では、セラミックグリーンシート５１を積層した第１積層体５９の表面に電極パターン６１を形成する。その第１積層体５９の外周を囲むように型枠６５を配置し、その型枠６５内にセラミックスラリー６３を流し込んで電極パターン６１等の表面を覆う。その後、乾燥した第２積層体を焼成してセラミックヒータを作製することで、厚みの大きなＲＦ電極の周囲に隙間なくセラミックスラリー６３を充填でき、焼成の際にクラック等の破損が生じにくくなる。【選択図】図４
METHOD OF MANUFACTURING CERAMIC HEATER
セラミックヒータの製造方法
OGAWA TAKAMICHI (author)
2018-08-16
Patent
Electronic Resource
Japanese
DEVICE FOR MANUFACTURING CERAMIC HEATER, AND METHOD OF MANUFACTURING CERAMIC HEATER
| European Patent Office | 2015
| European Patent Office | 2019