CERAMIC JOINED BODY AND METHOD FOR PRODUCING CERAMIC JOINED BODY: Fid-Bau Portal

CERAMIC JOINED BODY AND METHOD FOR PRODUCING CERAMIC JOINED BODY

HOTTA GENKI / TANGE HIDEO / MITSUYA KOHEI / OGAWA TAKAMICHI

To suppress the reduction of bonding strength between a first ceramic member and a second ceramic member and the development of microcracks.SOLUTION: There is provided a ceramic joined body which comprises a first ceramic member formed of a material mainly composed of AlN, a second ceramic member formed of a material mainly composed of AlN and a joint part which is disposed between the first ceramic member and the second ceramic member and joins the first ceramic member and the second ceramic member. The joint part is exposed to the outside, is in contact with both of the first ceramic member and the second ceramic member and includes a first joint part formed of a material mainly composed of AlN and a second joint part formed of a material mainly composed of a composite oxide containing Al.SELECTED DRAWING: Figure 3

【課題】第１のセラミックス部材と第２のセラミックス部材との接合強度の低下およびマイクロクラックの進展を抑制する。【解決手段】セラミックス接合体は、ＡｌＮを主成分とする材料により形成された第１のセラミックス部材と、ＡｌＮを主成分とする材料により形成された第２のセラミックス部材と、第１のセラミックス部材と第２のセラミックス部材との間に配置され、第１のセラミックス部材と第２のセラミックス部材とを接合する接合部と、を備える。接合部は、外部に露出し、かつ、第１のセラミックス部材と第２のセラミックス部材との両方に接触し、ＡｌＮを主成分とする材料により形成された第１の接合部と、Ａｌを含む複合酸化物を主成分とする材料により形成された第２の接合部と、を含む。【選択図】図３

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