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    CERAMIC JOINED BODY, ELECTROSTATIC CHUCKING DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

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    A ceramic joined body includes: a pair of ceramic plates; and an electrode layer that is interposed between the pair of ceramic plates, in which the electrode layer is embedded in at least one of the pair of ceramic plates, and in an outer edge of the electrode layer, a joint surface between the at least one of the pair of ceramic plates and the electrode layer has an inclination with respect to a thickness direction of the pair of ceramic plates and the electrode layer.

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    CERAMIC JOINED BODY, ELECTROSTATIC CHUCKING DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

    New search for: ARIKAWA JUN
    New search for: HIDAKA NOBUHIRO
    New search for: MIURA YUKIO

    A ceramic joined body includes: a pair of ceramic plates; and an electrode layer that is interposed between the pair of ceramic plates, in which the electrode layer is embedded in at least one of the pair of ceramic plates, and in an outer edge of the electrode layer, a joint surface between the at least one of the pair of ceramic plates and the electrode layer has an inclination with respect to a thickness direction of the pair of ceramic plates and the electrode layer.

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    CERAMIC JOINED BODY, ELECTROSTATIC CHUCKING DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

    New search for: ARIKAWA JUN
    New search for: HIDAKA NOBUHIRO
    New search for: MIURA YUKIO

    A ceramic joined body includes: a pair of ceramic plates; and an electrode layer that is interposed between the pair of ceramic plates, in which the electrode layer is embedded in at least one of the pair of ceramic plates, and in an outer edge of the electrode layer, a joint surface between the at least one of the pair of ceramic plates and the electrode layer has an inclination with respect to a thickness direction of the pair of ceramic plates and the electrode layer.

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    Title:

    CERAMIC JOINED BODY, ELECTROSTATIC CHUCKING DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

    Contributors:

    ARIKAWA JUN (author) / HIDAKA NOBUHIRO (author) / MIURA YUKIO (author)

    Publication date:

    2023-11-30

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / C04B Kalk , LIME / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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