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A platform for research: civil engineering, architecture and urbanism
CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY
A ceramic joined body (1) which is provided with: a pair of ceramic plates (2, 3) containing a conductive substance; a conductive layer (4) and an insulating layer (5), which are interposed between the pair of ceramic plates (2, 3); and a pair of intermediate layers (6, 7) which are interposed between the pair of ceramic plates (2, 3) and the conductive layer (4), while being in contact with the pair of ceramic plates (2, 3) and the conductive layer (4).
L'invention concerne un corps assemblé en céramique (1) qui comporte : une paire de plaques en céramique (2, 3) contenant une substance conductrice ; une couche conductrice (4) et une couche isolante (5), qui sont interposées entre la paire de plaques en céramique (2, 3) ; et une paire de couches intermédiaires (6, 7) qui sont interposées entre la paire de plaques en céramique (2, 3) et la couche conductrice (4), tout en étant en contact avec la paire de plaques en céramique (2, 3) et la couche conductrice (4).
導電性物質を含む一対のセラミックス板（２，３）と、一対のセラミックス板（２，３）の間に介在する導電層（４）および絶縁層（５）と、一対のセラミックス板（２，３）と導電層（４）の間に介在し、一対のセラミックス板（２，３）および導電層（４）に接触する、一対の中間層（６，７）と、を備えるセラミックス接合体（１）。
CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY
A ceramic joined body (1) which is provided with: a pair of ceramic plates (2, 3) containing a conductive substance; a conductive layer (4) and an insulating layer (5), which are interposed between the pair of ceramic plates (2, 3); and a pair of intermediate layers (6, 7) which are interposed between the pair of ceramic plates (2, 3) and the conductive layer (4), while being in contact with the pair of ceramic plates (2, 3) and the conductive layer (4).
L'invention concerne un corps assemblé en céramique (1) qui comporte : une paire de plaques en céramique (2, 3) contenant une substance conductrice ; une couche conductrice (4) et une couche isolante (5), qui sont interposées entre la paire de plaques en céramique (2, 3) ; et une paire de couches intermédiaires (6, 7) qui sont interposées entre la paire de plaques en céramique (2, 3) et la couche conductrice (4), tout en étant en contact avec la paire de plaques en céramique (2, 3) et la couche conductrice (4).
導電性物質を含む一対のセラミックス板（２，３）と、一対のセラミックス板（２，３）の間に介在する導電層（４）および絶縁層（５）と、一対のセラミックス板（２，３）と導電層（４）の間に介在し、一対のセラミックス板（２，３）および導電層（４）に接触する、一対の中間層（６，７）と、を備えるセラミックス接合体（１）。
CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY
CORPS ASSEMBLÉ EN CÉRAMIQUE, DISPOSITIF DE MANDRIN ÉLECTROSTATIQUE ET PROCÉDÉ DE PRODUCTION D'UN CORPS ASSEMBLÉ EN CÉRAMIQUE
セラミックス接合体、静電チャック装置、セラミックス接合体の製造方法
HIDAKA NOBUHIRO (author) / MIURA YUKIO (author) / ARIKAWA JUN (author) / KUGIMOTO HIRONORI (author)
2021-08-05
Patent
Electronic Resource
Japanese
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