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COMBINED SUBSTRATE, AND MANUFACTURING METHOD OF ELEMENT SUBSTRATE USING IT
To provide a combined substrate having excellent division accuracy.SOLUTION: The combined substrate of the present invention that includes a plurality of element substrate areas partitioned by dividing grooves is made up of a glass-ceramic sintered body in which anorthite crystals are precipitated.SELECTED DRAWING: Figure 1
【課題】分割精度に優れた連結基板を提供する。【解決手段】本発明の連結基板は、分割溝によって区画された複数の素子基板領域を有する連結基板において、アノーサイト結晶が析出したガラスセラミックス焼結体であることを特徴とする。【選択図】図1
COMBINED SUBSTRATE, AND MANUFACTURING METHOD OF ELEMENT SUBSTRATE USING IT
To provide a combined substrate having excellent division accuracy.SOLUTION: The combined substrate of the present invention that includes a plurality of element substrate areas partitioned by dividing grooves is made up of a glass-ceramic sintered body in which anorthite crystals are precipitated.SELECTED DRAWING: Figure 1
【課題】分割精度に優れた連結基板を提供する。【解決手段】本発明の連結基板は、分割溝によって区画された複数の素子基板領域を有する連結基板において、アノーサイト結晶が析出したガラスセラミックス焼結体であることを特徴とする。【選択図】図1
COMBINED SUBSTRATE, AND MANUFACTURING METHOD OF ELEMENT SUBSTRATE USING IT
連結基板及びそれを用いた素子基板の製造方法
YAMAGUCHI TAKAHISA (author)
2021-09-16
Patent
Electronic Resource
Japanese
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