A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
COMPOSITE OXIDE SINTERED BODY AND SPUTTERING TARGET COMPRISING SAME
In, Zn 및 Sn을 포함하고, 소결체 밀도가 상대 밀도로 90% 이상이고, 평균 결정 입경이 10μm 이하이고, 벌크 저항이 30mΩcm 이하이며, 직경 10μm 이상의 산화주석의 응집 입자수가 1.00mm당 2.5개 이하인 복합 산화물 소결체.
A composite oxide sintered body includes In, Zn, and Sn, and has a relative density of 90% or more, an average crystal grain size of 10 μm or less, and a bulk resistance of 30 mΩcm or less, the number of tin oxide aggregate particles having a diameter of 10 μm or more being 2.5 or less per mm2 of the composite oxide sintered body.
COMPOSITE OXIDE SINTERED BODY AND SPUTTERING TARGET COMPRISING SAME
In, Zn 및 Sn을 포함하고, 소결체 밀도가 상대 밀도로 90% 이상이고, 평균 결정 입경이 10μm 이하이고, 벌크 저항이 30mΩcm 이하이며, 직경 10μm 이상의 산화주석의 응집 입자수가 1.00mm당 2.5개 이하인 복합 산화물 소결체.
A composite oxide sintered body includes In, Zn, and Sn, and has a relative density of 90% or more, an average crystal grain size of 10 μm or less, and a bulk resistance of 30 mΩcm or less, the number of tin oxide aggregate particles having a diameter of 10 μm or more being 2.5 or less per mm2 of the composite oxide sintered body.
COMPOSITE OXIDE SINTERED BODY AND SPUTTERING TARGET COMPRISING SAME
복합 산화물 소결체 및 그것으로 이루어지는 스퍼터링 타겟
2015-09-01
Patent
Electronic Resource
Korean
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