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NIOBIUM OXIDE SINTERED COMPACT SPUTTERING TARGET COMPRISING SINTERED COMPACT AND METHOD FOR MANUFACTURING NIOBIUM OXIDE SINTERED COMPACT
본 발명은 NbO(2
The present invention provides a niobium oxide sintered compact having a composition of NbOx (2
NIOBIUM OXIDE SINTERED COMPACT SPUTTERING TARGET COMPRISING SINTERED COMPACT AND METHOD FOR MANUFACTURING NIOBIUM OXIDE SINTERED COMPACT
본 발명은 NbO(2
The present invention provides a niobium oxide sintered compact having a composition of NbOx (2
NIOBIUM OXIDE SINTERED COMPACT SPUTTERING TARGET COMPRISING SINTERED COMPACT AND METHOD FOR MANUFACTURING NIOBIUM OXIDE SINTERED COMPACT
니오븀 산화물 소결체 및 해당 소결체로 이루어지는 스퍼터링 타깃, 그리고 니오븀 산화물 소결체의 제조 방법
2018-10-29
Patent
Electronic Resource
Korean
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