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Niobium oxide sintered compact, sputtering target formed from said sintered compact, and method of producing niobium oxide sintered compact
The present invention provides a niobium oxide sintered compact having a composition of NbOx (2
Niobium oxide sintered compact, sputtering target formed from said sintered compact, and method of producing niobium oxide sintered compact
The present invention provides a niobium oxide sintered compact having a composition of NbOx (2
Niobium oxide sintered compact, sputtering target formed from said sintered compact, and method of producing niobium oxide sintered compact
NARITA SATOYASU (author)
2020-03-17
Patent
Electronic Resource
English
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