A platform for research: civil engineering, architecture and urbanism
NIOBIUM OXIDE SINTERED COMPACT, SPUTTERING TARGET FORMED FROM SAID SINTERED COMPACT, AND METHOD OF PRODUCING NIOBIUM OXIDE SINTERED COMPACT
The present invention provides a niobium oxide sintered compact having a composition of NbOx (2
NIOBIUM OXIDE SINTERED COMPACT, SPUTTERING TARGET FORMED FROM SAID SINTERED COMPACT, AND METHOD OF PRODUCING NIOBIUM OXIDE SINTERED COMPACT
The present invention provides a niobium oxide sintered compact having a composition of NbOx (2
NIOBIUM OXIDE SINTERED COMPACT, SPUTTERING TARGET FORMED FROM SAID SINTERED COMPACT, AND METHOD OF PRODUCING NIOBIUM OXIDE SINTERED COMPACT
NARITA SATOYASU (author)
2017-10-26
Patent
Electronic Resource
English
European Patent Office | 2020
|European Patent Office | 2018
European Patent Office | 2017
|European Patent Office | 2016
|Oxide sintered compact and sputtering target formed from said oxide sintered compact
European Patent Office | 2018
|