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Polycrystalline CaF2 member, member for plasma treatment device, plasma treatment device, and method for producing focusing ring
A polycrystalline CaF2 member includes a combined assembly of a plurality of polycrystalline bodies made from CaF2 that are pressure bonded together.
Polycrystalline CaF2 member, member for plasma treatment device, plasma treatment device, and method for producing focusing ring
A polycrystalline CaF2 member includes a combined assembly of a plurality of polycrystalline bodies made from CaF2 that are pressure bonded together.
Polycrystalline CaF2 member, member for plasma treatment device, plasma treatment device, and method for producing focusing ring
UEHARA NAOYASU (author)
2018-09-11
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
/
C01F
COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
,
Verbindungen der Metalle Beryllium, Magnesium, Aluminium, Calcium, Strontium, Barium, Radium, Thorium oder der Seltenen Erden
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
C30B
SINGLE-CRYSTAL GROWTH
,
Züchten von Einkristallen
/
H01J
Elektrische Entladungsröhren oder Entladungslampen
,
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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