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A platform for research: civil engineering, architecture and urbanism
CERAMICS MATERIAL METHOD FOR MANUFACTURING THE SAME AND MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
The present invention relates to a material for ceramics, a production method thereof, and a member for semiconductor production apparatuses. The material for ceramics includes crystalline composite oxide of group 2 element M and rare-earth element RE. The group 2 element M is one of Sr, Ca, or Ba, and a new first peak is observed between a peak of a (040) plane and a peak of a (320) plane of MRE_2O_4 in an X-ray diffraction (XRD) chart. The material for ceramics is produced by the following steps: preparing MRE_2O_4 as a raw spray material; and spraying the raw spray material to a predetermined target object.
본 발명의 세라믹스 재료는, 제2족 원소 M과 희토류 원소 RE의 복합 산화물의 결정상을 포함하고, 제2족 원소 M은 Sr, Ca 또는 Ba이고, XRD 차트에 있어서 MREO의 (040)면의 피크와 (320)면의 피크 사이에 제1 신규 피크가 관찰되는 것이다. 이러한 세라믹스 재료는, 예컨대, 용사용 원료로서 MREO를 준비하고, 상기 용사용 원료를 미리 정해진 대상물에 용사함으로써 제조할 수 있다.
CERAMICS MATERIAL METHOD FOR MANUFACTURING THE SAME AND MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
The present invention relates to a material for ceramics, a production method thereof, and a member for semiconductor production apparatuses. The material for ceramics includes crystalline composite oxide of group 2 element M and rare-earth element RE. The group 2 element M is one of Sr, Ca, or Ba, and a new first peak is observed between a peak of a (040) plane and a peak of a (320) plane of MRE_2O_4 in an X-ray diffraction (XRD) chart. The material for ceramics is produced by the following steps: preparing MRE_2O_4 as a raw spray material; and spraying the raw spray material to a predetermined target object.
본 발명의 세라믹스 재료는, 제2족 원소 M과 희토류 원소 RE의 복합 산화물의 결정상을 포함하고, 제2족 원소 M은 Sr, Ca 또는 Ba이고, XRD 차트에 있어서 MREO의 (040)면의 피크와 (320)면의 피크 사이에 제1 신규 피크가 관찰되는 것이다. 이러한 세라믹스 재료는, 예컨대, 용사용 원료로서 MREO를 준비하고, 상기 용사용 원료를 미리 정해진 대상물에 용사함으로써 제조할 수 있다.
CERAMICS MATERIAL METHOD FOR MANUFACTURING THE SAME AND MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
세라믹스 재료, 그 제조 방법 및 반도체 제조 장치용 부재
SATO YOSUKE (author) / INOUE KATSUHIRO (author) / KATSUDA YUJI (author)
2017-02-08
Patent
Electronic Resource
Korean
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