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Aluminum nitride based crucible and method for manufacturing same
The present invention relates to a method for manufacturing an aluminum nitride-based crucible and an aluminum nitride-based crucible manufactured thereby. The method for manufacturing an aluminum nitride-based crucible comprises the steps of: a) manufacturing a molded body by molding raw material powder comprising aluminum nitride powder and yttria (Y_2O_3) powder; b) manufacturing an aluminum nitride-based ceramic base material by sintering the molded body; and c) thermally treating the base material at an atmosphere of raw material gas of boron (B) or raw material gas of carbon (C) to make boron (B) or carbon (C) permeated into the base material. According to the present invention, generation of cracks in the crucible can be prevented by suppressing chemical reaction between molten aluminum and the crucible.
본 발명은 a) 질화알루미늄 분말 및 산화이트륨(Y2O3) 분말을 포함하는 원료분말을 성형하여 성형체를 제조하는 단계; b) 상기 성형체를 소결하여 질화알루미늄계 세라믹 모재를 제조하는 단계; 및 c) 상기 모재를 붕소(B) 원료가스 또는 탄소(C) 원료가스 분위기에서 열처리하여 상기 모재에 붕소(B) 또는 탄소(C)를 침투시키는 단계;를 포함하는 질화알루미늄계 도가니의 제조방법, 및 이로부터 제조된 질화알루미늄계 도가니에 관한 것이다.
Aluminum nitride based crucible and method for manufacturing same
The present invention relates to a method for manufacturing an aluminum nitride-based crucible and an aluminum nitride-based crucible manufactured thereby. The method for manufacturing an aluminum nitride-based crucible comprises the steps of: a) manufacturing a molded body by molding raw material powder comprising aluminum nitride powder and yttria (Y_2O_3) powder; b) manufacturing an aluminum nitride-based ceramic base material by sintering the molded body; and c) thermally treating the base material at an atmosphere of raw material gas of boron (B) or raw material gas of carbon (C) to make boron (B) or carbon (C) permeated into the base material. According to the present invention, generation of cracks in the crucible can be prevented by suppressing chemical reaction between molten aluminum and the crucible.
본 발명은 a) 질화알루미늄 분말 및 산화이트륨(Y2O3) 분말을 포함하는 원료분말을 성형하여 성형체를 제조하는 단계; b) 상기 성형체를 소결하여 질화알루미늄계 세라믹 모재를 제조하는 단계; 및 c) 상기 모재를 붕소(B) 원료가스 또는 탄소(C) 원료가스 분위기에서 열처리하여 상기 모재에 붕소(B) 또는 탄소(C)를 침투시키는 단계;를 포함하는 질화알루미늄계 도가니의 제조방법, 및 이로부터 제조된 질화알루미늄계 도가니에 관한 것이다.
Aluminum nitride based crucible and method for manufacturing same
질화알루미늄계 도가니 및 이의 제조방법
YOON JONG MAN (author)
2021-06-29
Patent
Electronic Resource
Korean
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