A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Molecular beam epitaxy aluminum nitride ceramic crucible and manufacturing method thereof
The invention relates to the technical field of molecular beam epitaxy, and discloses a molecular beam epitaxy aluminum nitride ceramic crucible and a manufacturing method thereof.The molecular beam epitaxy aluminum nitride ceramic crucible is prepared from aluminum nitride powder, and the aluminum nitride powder is prepared from, by mass, 1-5 parts of a sintering aid, 0.00001-0.0001 part of a metal titanium source and 95-99 parts of aluminum nitride powder; the manufacturing method of the molecular beam epitaxy aluminum nitride ceramic crucible comprises the following steps: preparing aluminum nitride powder; preparing slurry; forming a green body; discharging glue; performing oxidation; sintering the green body; polishing to obtain a finished product. By means of the manufacturing method, the large-depth thin-wall cup-shaped structure crucible can be manufactured, the heat conductivity of the manufactured molecular beam epitaxy aluminum nitride ceramic crucible is far higher than that of a traditional pyrolytic boron nitride material crucible, the heat conduction capacity of the crucible can be greatly improved, the temperature difference between the interior and the exterior of the crucible can be effectively eliminated, the energy utilization efficiency is improved, and energy consumption is reduced.
本申请涉及分子束外延技术领域，公开了一种分子束外延氮化铝陶瓷坩埚及其制作方法，所述分子束外延氮化铝陶瓷坩埚由氮化铝粉体制作获得，所述氮化铝粉体按质量份数计，包括以下组分：1份~5份烧结助剂，0.00001份~0.0001份金属钛源，95份~99份氮化铝粉末；所述的分子束外延氮化铝陶瓷坩埚的制作方法包括以下步骤：配制氮化铝粉体；调制浆料；坯体成型；排胶；氧化；坯体烧结；打磨得成品。所提供的制作方法能够制得深度较大的薄壁杯状结构坩埚，所制得的分子束外延氮化铝陶瓷坩埚导热率远高于传统的热解氮化硼材料坩埚，可极大提高坩埚的导热能力，有效消除坩埚内外温度差，提高能量利用效率，降低能耗。
Molecular beam epitaxy aluminum nitride ceramic crucible and manufacturing method thereof
The invention relates to the technical field of molecular beam epitaxy, and discloses a molecular beam epitaxy aluminum nitride ceramic crucible and a manufacturing method thereof.The molecular beam epitaxy aluminum nitride ceramic crucible is prepared from aluminum nitride powder, and the aluminum nitride powder is prepared from, by mass, 1-5 parts of a sintering aid, 0.00001-0.0001 part of a metal titanium source and 95-99 parts of aluminum nitride powder; the manufacturing method of the molecular beam epitaxy aluminum nitride ceramic crucible comprises the following steps: preparing aluminum nitride powder; preparing slurry; forming a green body; discharging glue; performing oxidation; sintering the green body; polishing to obtain a finished product. By means of the manufacturing method, the large-depth thin-wall cup-shaped structure crucible can be manufactured, the heat conductivity of the manufactured molecular beam epitaxy aluminum nitride ceramic crucible is far higher than that of a traditional pyrolytic boron nitride material crucible, the heat conduction capacity of the crucible can be greatly improved, the temperature difference between the interior and the exterior of the crucible can be effectively eliminated, the energy utilization efficiency is improved, and energy consumption is reduced.
本申请涉及分子束外延技术领域，公开了一种分子束外延氮化铝陶瓷坩埚及其制作方法，所述分子束外延氮化铝陶瓷坩埚由氮化铝粉体制作获得，所述氮化铝粉体按质量份数计，包括以下组分：1份~5份烧结助剂，0.00001份~0.0001份金属钛源，95份~99份氮化铝粉末；所述的分子束外延氮化铝陶瓷坩埚的制作方法包括以下步骤：配制氮化铝粉体；调制浆料；坯体成型；排胶；氧化；坯体烧结；打磨得成品。所提供的制作方法能够制得深度较大的薄壁杯状结构坩埚，所制得的分子束外延氮化铝陶瓷坩埚导热率远高于传统的热解氮化硼材料坩埚，可极大提高坩埚的导热能力，有效消除坩埚内外温度差，提高能量利用效率，降低能耗。
Molecular beam epitaxy aluminum nitride ceramic crucible and manufacturing method thereof
一种分子束外延氮化铝陶瓷坩埚及其制作方法
HUANG XINGXING (author) / WU JIN (author) / BI SHIBO (author) / ZHU JINGMING (author)
2023-11-03
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
/
B28B
Formgeben von Ton oder anderen keramischen Stoffzusammensetzungen, Schlacke oder von Mischungen, die zementartiges Material enthalten, z.B. Putzmörtel
,
SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG OR MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
/
C30B
SINGLE-CRYSTAL GROWTH
,
Züchten von Einkristallen
Manufacturing method of aluminum nitride using porous carbon crucible
European Patent Office | 2022
Manufacturing method of aluminum nitride using porous carbon crucible
| European Patent Office | 2021
Aluminum nitride based crucible and method for manufacturing same
European Patent Office | 2021
Aluminum nitride based crucible and method for manufacturing same
| European Patent Office | 2021
Preparation method of aluminum nitride ceramic complex crucible for titanium alloy induction melting
| European Patent Office | 2023