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PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING NITRIDE FILMS USING SAME
A Si-containing film forming composition comprising a catalyst and/or a polysilane and a N-H free, C-free, and Si-rich perhydropolysilazane having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton and comprising N-H free repeating units having the formula [-N(SiH3)x(SiH2-)y], wherein x=0, 1, or 2 and y= 0, 1, or 2 with x+y=2; and x= 0, 1 or 2 and y=1, 2, or 3 with x+y=3. Also disclosed are synthesis methods and applications for using the same.
L'invention concerne une composition filmogène contenant du Si comprenant un catalyseur et/ou un polysilane et un perhydropolysilazane exempt de N-H, exempt de C et riche en Si présentant un poids moléculaire allant d'environ 332 daltons à environ 100 000 daltons et comprenant des motifs répétés exempts de N-H de formule [-N(SiH3)x(SiH2-)y], où x = 0, 1 ou 2 et y = 0, 1 ou 2 avec x + y = 2; et x = 0, 1 ou 2 et y = 1, 2 ou 3 avec x + y = 3. L'invention concerne également des procédés de synthèse et des applications pour l'utilisation de ces compositions.
PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING NITRIDE FILMS USING SAME
A Si-containing film forming composition comprising a catalyst and/or a polysilane and a N-H free, C-free, and Si-rich perhydropolysilazane having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton and comprising N-H free repeating units having the formula [-N(SiH3)x(SiH2-)y], wherein x=0, 1, or 2 and y= 0, 1, or 2 with x+y=2; and x= 0, 1 or 2 and y=1, 2, or 3 with x+y=3. Also disclosed are synthesis methods and applications for using the same.
L'invention concerne une composition filmogène contenant du Si comprenant un catalyseur et/ou un polysilane et un perhydropolysilazane exempt de N-H, exempt de C et riche en Si présentant un poids moléculaire allant d'environ 332 daltons à environ 100 000 daltons et comprenant des motifs répétés exempts de N-H de formule [-N(SiH3)x(SiH2-)y], où x = 0, 1 ou 2 et y = 0, 1 ou 2 avec x + y = 2; et x = 0, 1 ou 2 et y = 1, 2 ou 3 avec x + y = 3. L'invention concerne également des procédés de synthèse et des applications pour l'utilisation de ces compositions.
PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING NITRIDE FILMS USING SAME
COMPOSITIONS DE PERHYDROPOLYSILAZANE ET PROCÉDÉS DE FABRICATION DE FILMS DE NITRURE LES UTILISANT
SANCHEZ ANTONIO (author) / ITOV GENNADIY (author) / KHANDELWAL MANISH (author) / RITTER COLE (author) / ZHANG PENG (author) / GIRARD JEAN-MARC (author) / WAN ZHIWEN (author) / KUCHENBEISER GLENN (author) / ORBAN DAVID (author) / KERRIGAN SEAN (author)
2019-08-29
Patent
Electronic Resource
English
IPC:
C08G
MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
,
Makromolekulare Verbindungen, anders erhalten als durch Reaktionen, an denen nur ungesättigte Kohlenstoff-Kohlenstoff-Bindungen beteiligt sind
/
B05D
PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
,
Verfahren zum Aufbringen von Flüssigkeiten oder von anderen fließfähigen Stoffen auf Oberflächen allgemein
/
C01B
NON-METALLIC ELEMENTS
,
Nichtmetallische Elemente
/
C04B
Kalk
,
LIME
/
C09D
Überzugsmittel, z.B. Anstrichstoffe, Firnisse oder Lacke
,
COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS
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